Micro oscillating element

Abstract

A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.

1 . A micro oscillating element comprising: 
 an oscillation section supporting frame;    an oscillation section including a movable functional section, an arm section and a first comb-tooth electrode, the arm section extending from the movable functional section, the first comb-tooth electrode including a plurality of first electrode teeth each extending from the arm section in a direction intersecting the arm section;    a torsional joining section which connects the frame and the oscillation section to each other and also defines an oscillation axis of an oscillating operation of the oscillation section; and    a second comb-tooth electrode cooperating with the first comb-tooth electrode for causing the oscillation section to oscillate, the second comb-tooth electrode comprising a plurality of second electrode teeth each extending from the frame in a direction intersecting the arm section.    
   
   
       2 . The micro oscillating element according to  claim 1 , wherein each of the plurality of first electrode teeth extends in parallel to the oscillation axis.  
   
   
       3 . The micro oscillating element according to  claim 1 , wherein each of the plurality of first electrode teeth extends in a direction intersecting the oscillation axis.  
   
   
       4 . The micro oscillating element according to  claim 1 , wherein each of the second electrode teeth extends in parallel to the first electrode teeth.  
   
   
       5 . The micro oscillating element according to  claim 1 , wherein the first comb-tooth electrode comprises at least three first electrode teeth, and wherein a distance between two adjacent first electrode teeth increases away from the oscillation axis.  
   
   
       6 . The micro oscillating element according to  claim 1 , wherein the second comb-tooth electrode comprises at least three second electrode teeth, and wherein a distance between two adjacent second electrode teeth increases away from the oscillation axis.  
   
   
       7 . The micro oscillating element according to  claim 1 , wherein a relevant one of the first electrode teeth is positioned between two adjacent second electrode teeth in a longitudinal direction of the arm section, the relevant one of the first electrode teeth being offset toward the oscillation axis from a central position between these two second electrode teeth.  
   
   
       8 . The micro oscillating element according to  claim 1 , wherein a relevant one of the first electrode teeth is positioned between two adjacent second electrode teeth in a longitudinal direction of the arm section, the relevant one of the first electrode teeth being offset away from the oscillation axis from a central position between these two second electrode teeth.  
   
   
       9 . The micro oscillating element according to  claim 1 , further comprising a third comb-tooth electrode and a fourth comb-tooth electrode cooperating with the third comb-tooth electrode for causing the oscillation section to oscillate, wherein the third comb-tooth electrode comprises a plurality of third electrode teeth that extend from the arm section in a direction intersecting the arm section, and that are spaced from each other in a longitudinal direction of the arm section, and wherein the fourth comb-tooth electrode comprises a plurality of fourth electrode teeth that extend from the frame in a direction intersecting the arm section, and that are spaced from each other in a longitudinal direction of the arm section, the fourth comb-tooth electrode being electrically separated from the second comb-tooth electrode.  
   
   
       10 . The micro oscillating element according to  claim 9 , wherein the first comb-tooth electrode and the third comb-tooth electrodes are electrically connected to each other.  
   
   
       11 . The micro oscillating element according to  claim 1 , further comprising an additional arm section extending from the movable functional section, a third comb-tooth electrode and a fourth comb-tooth electrode, wherein the third comb-tooth electrode comprises a plurality of third electrode teeth that extend from the additional arm section in a direction intersecting the additional arm section, and that are spaced from each other in a longitudinal direction of the additional arm section, and wherein the fourth comb-tooth electrode comprises a plurality of fourth electrode teeth for causing the oscillation section to oscillate in cooperation with the third comb-tooth electrode, the fourth electrode teeth being arranged to extend from the frame in a direction intersecting the additional arm section and to be spaced from each other in a longitudinal direction of the additional arm section, the first comb-tooth electrode and the third comb-tooth electrode being electrically separated from each other.  
   
   
       12 . The micro oscillating element according to  claim 11 , wherein the second comb-tooth electrode and the fourth comb-tooth electrodes are electrically connected to each other.  
   
   
       13 . The micro oscillating element according to  claim 1 , further comprising an additional frame, an additional torsional joining section and a driving mechanism, wherein the additional torsional joining section connects the oscillation section supporting frame and the additional frame to each other and also defines an additional oscillation axis of an oscillating operation of the additional frame, wherein the additional oscillation axis extends in a direction intersecting the oscillation axis of the oscillation section supporting frame, and wherein the driving mechanism causes the additional frame to oscillate about the additional oscillation axis.