Metal filling process and metal filling apparatus

Abstract

A metal filling process is provided in which micro holes formed in a work piece are filled with metal by immersing the work piece in molten metal and then removing the work piece from the molten metal. As the work piece is dipped into molten metal, a bottom surface of the work piece is tilted to an angle of 0.5° or more relative to the surface of the molten metal, and as the work piece is removed from the molten metal, a top surface of the work piece is tilted to an angle of 0.5° or more and less than 85° relative to the surface of the molten metal. Failures such as a work piece fracturing when it is dipped into molten metal, or when it is removed from molten metal, are prevented, and failures such as metal remaining on a surface of a work piece after the work piece has been removed from molten metal are also prevented.

1 . A metal filling process comprising immersing a plate shaped work piece with micro holes formed therein in molten metal and then removing said work piece from said molten metal to fill said micro holes with metal, wherein 
 as said work piece is dipped into said molten metal, a bottom surface of said work piece is tilted to an angle of 0.5° or more relative to a surface of said molten metal.    
   
   
       2 . A metal filling process comprising immersing a plate shaped work piece with micro holes formed therein in molten metal and then removing said work piece from said molten metal to fill said micro holes with metal, wherein 
 as said work piece is removed from said molten metal, a top surface of said work piece is tilted to an angle of 0.5° or more and less than 85° relative to a surface of said molten metal.    
   
   
       3 . A metal filling process comprising immersing a plate shaped work piece with micro holes formed therein in molten metal and then removing said work piece from said molten metal to fill said micro holes with metal, wherein 
 a dipping operation of said work piece in said molten metal is begun with a bottom surface of said work piece tilted relative to a molten metal surface and, as said dipping operation progresses, an angle of said bottom surface of said work piece relative to said molten metal surface is made gradually parallel to said molten metal surface, and, thereafter, a top surface of said work piece is gradually tilted relative to said molten metal surface as said work piece is being taken out from said molten metal.    
   
   
       4 . The metal filling process according to any of  claims 1  to  3 , further comprising vibrating said work piece after said work piece has been taken out of said molten metal such that metal adhering to a surface of said work piece is removed.  
   
   
       5 . The metal filling process according to any of  claims 1  to  3 , further comprising vibrating said work piece after the work piece has been taken out of said molten metal such that bubbles present inside the metal in said micro holes are removed.  
   
   
       6 . A metal filling apparatus that fills micro holes formed in a plate shaped work piece with metal by immersing said work piece in molten metal and then removing said work piece from said molten metal, comprising a configuration whereby 
 as said work piece is dipped into said molten metal, a bottom surface of said work piece is tilted to an angle of 0.5° or more relative to a surface of said molten metal.    
   
   
       7 . A metal filling apparatus that fills micro holes formed in a plate shaped work piece with metal by immersing said work piece in molten metal and then removing said work piece from said molten metal, comprising a configuration whereby 
 as said work piece is removed from said molten metal, a top surface of said work piece is tilted to an angle of 0.5° or more and less than 85° relative to a surface of said molten metal.    
   
   
       8 . A metal filling apparatus that fills micro holes formed in a plate shaped work piece with metal by immersing said work piece in molten metal and then removing said work piece from said molten metal, comprising a configuration whereby 
 as said work piece is dipped into said molten metal, a bottom surface of said work piece is tilted to an angle of 0.5° or more relative to a surface of said molten metal, and as said work piece is removed from said molten metal, a top surface of said work piece is tilted to an angle of 0.5° or more and less than 85° relative to said surface of said molten metal.    
   
   
       9 . A metal filling apparatus that fills micro holes formed in a plate shaped work piece with metal by immersing said work piece in molten metal and then removing said work piece from said molten metal, comprising a configuration whereby 
 a dipping operation of said work piece in said molten metal is begun with a bottom surface of said work piece tilted relative to a molten metal surface and, as said dipping operation progresses, an angle of said bottom surface of said work piece relative to said molten metal surface is made gradually parallel to said molten metal surface, and, thereafter, a top surface of said work piece is gradually tilted relative to said molten metal surface as said work piece is being taken out from said molten metal.