Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates

Abstract

Claimed is a sputtering target system comprising a plurality of backing plates ( 2, 3, 4 ) to be individually cooled. Each backing plate ( 2, 3, 4 ) is provided on its back side with a meandering groove ( 5 ) that is closed off by a sealing plate. The sealing plate ( 9 ) is welded around its circumference to the backing plate ( 2 ), and at the same time is welded to at least one ridge ( 7 ), located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate ( 3 ) not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate ( 20 ).

1 . Cooled backing plate for a sputtering target, on the front side of which the material to be sputtered may be applied, and on the back side of which means for cooling the backing plate are present, characterized in that in the backing plate at least one groove open to the back side of the backing plate runs between a coolant inlet and a coolant outlet, that the groove is enclosed by an outer frame of the backing plate, and within the frame at least one ridge, which runs at a distance from the frame, separates two grooved sections from one another, and that the open side of the groove is closed off by a sealing plate welded to the frame and the ridge to form a cooling channel having a closed cross section.  
   
   
       2 . Backing plate according to  claim 1 , characterized in that the inner edge of the frame is provided with a shoulder around its circumference for accommodating the sealing plate, the height of the shoulder corresponding to the thickness of the sealing plate so that the sealing plate resting on the shoulder is flush with the part of the frame that is not offset.  
   
   
       3 . Backing plate according to  claim 1 , characterized in that at least two pockets open to the back side are present in the frame which are covered by the sealing plate, holes lying above the pockets being present in the sealing plate for supplying and discharging a coolant.  
   
   
       4 . Backing plate according to  claim 3 , characterized in that the pockets are formed in the part of the frame that is not offset, and the sealing plate has lugs which lie above the pockets and in which the holes ( 12 ) for supplying and discharging a coolant are present.  
   
   
       5 . Backing plate according to  claim 1 , characterized in that the backing plate has a rectangular shape, and the front side of the backing plate is recessed on an end region along the entire width with respect to its main part.  
   
   
       6 . Backing plate according to  claim 5 , characterized in that a U-shaped filler sheet having a thickness corresponding to the depth of the recess is placed on the edge of the recessed region.  
   
   
       7 . Sputtering target comprising a plurality of backing plates according to  claim 1 , characterized in that these backing plates can be fastened at their mutually abutting end faces to support ridges of a supporting plate, the mutually abutting end faces of the backing plates being provided with corresponding shoulders.  
   
   
       8 . Backing plate placed on a supporting plate, the supporting plate having coolant boreholes that align with the coolant inlets and outlets, the transitions between the coolant boreholes and coolant inlets and outlets being sealed, characterized in that each seal comprises sealing rings radially separated at a distance from one another, between which an annular space is formed which is connected via a ventilation borehole to the side of the supporting plate that faces away from the backing plate.  
   
   
       9 . Backing plate placed on a supporting plate according to  claim 8 , characterized in that the sealing rings are situated in the side of the supporting plate that faces toward the backing plate.