Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices

Abstract

Improved nozzle design that discharges fluid streams through a series of nozzle orifices distributed along a length of the nozzle. The present invention may be incorporated into a wide range of microelectronic device manufacturing processes and equipment types for which an array of process streams are desired for treating microelectronic workpieces. The present invention is particularly useful to cryogenically clean microelectronic workpieces.

1 . A nozzle for use in an apparatus for treating a surface of a microelectronic workpiece, the nozzle comprising a body portion having an outside wall that defines an inside cavity of the body portion and a plurality of nozzle orifices distributed along a length of the body portion and providing a path through the outside wall of the body portion wherein at least two of the plurality of nozzle orifices have a diameter less than 0.0045 inches.  
   
   
       2 . The nozzle of  claim 1 , wherein the plurality of nozzle orifices are formed by electrical discharging machining a plurality of openings through the outside wall of the body portion.  
   
   
       3 . The nozzle of  claim 1 , further comprising a distribution conduit within the inside cavity of the body portion, the distribution conduit comprising a plurality of delivery openings formed though a wall that defines an inside cavity of the distribution conduit and distributed along a length of the distribution conduit.  
   
   
       4 . The nozzle of  claim 1  in combination with an apparatus for treating a surface of a microelectronic workpiece.  
   
   
       5 . The combination of  claim 4 , wherein the plurality of nozzle orifices are formed by electrical discharging machining a plurality of openings through the outside wall of the body portion.  
   
   
       6 . The combination of  claim 5 , further comprising a distribution conduit within the inside cavity of the body portion, the distribution conduit comprising a plurality of delivery openings formed though a wall that defines an inside cavity of the distribution conduit and distributed along a length of the distribution conduit.  
   
   
       7 . An apparatus for treating a surface of a microelectronic workpiece, the apparatus comprising: 
 a treatment chamber in which a microelectronic workpiece is positioned for treatment;    a nozzle at least partially positioned in the treatment chamber and operatively positioned relative to the microelectronic workpiece, the nozzle comprising a plurality of nozzle orifices distributed along a length of the nozzle in a manner effective to aim the plurality of nozzle orifices toward the microelectronic workpiece wherein at least two of the nozzle orifices have a diameter less than 0.0045 inches; and    a cryogenic material being discharged from the nozzle toward the workpiece.    
   
   
       8 . The nozzle of  claim 7 , wherein the plurality of nozzle orifices are formed by electrical discharging machining a plurality of openings through a wall of the nozzle.  
   
   
       9 . A method of treating a surface of a workpiece, the method comprising the steps of: 
 providing an apparatus for treating a surface of a microelectronic workpiece, the apparatus comprising: 
 a treatment chamber in which a microelectronic workpiece is positioned for treatment;  
 a nozzle at least partially positioned in the treatment chamber and operatively positioned relative to the microelectronic workpiece, the nozzle comprising a plurality of nozzle orifices distributed along a length of the nozzle and aimed toward the microelectronic workpiece wherein at least two of the nozzle orifices have a diameter less than 0.0045 inches; and,  
   causing a process fluid to be cryogenically discharged from the nozzle orifices onto the workpiece surface.    
   
   
       10 . The method of  claim 9 , wherein the plurality of nozzle orifices of the nozzle are formed by electrical discharging machining a plurality of openings through a wall of the nozzle.  
   
   
       11 . A method of making a nozzle for use in an apparatus for treating a surface of a microelectronic workpiece, the method comprising the steps of providing a body portion comprising a wall that defines an inside cavity of the body portion and forming a plurality of nozzle orifices distributed along a length of the body portion that provide a path through the outside wall of the body portion wherein at least two of the plurality of nozzle orifices have a diameter less than 0.0045 inches.  
   
   
       12 . The method of  claim 11 , further comprising the step of forming the plurality of nozzle orifices by electrical discharging machining a plurality of openings through the wall of the nozzle.  
   
   
       13 . The method of  claim 11 , further comprising the step of providing a distribution conduit within the inside cavity of the body portion, the distribution conduit comprising a plurality of delivery openings formed though a wall that defines an inside cavity of the distribution conduit and distributed along a length of the distribution conduit.