Lid unit for thin-plate supporting container

Abstract

The attaching-and-detaching operation of a lid unit is automated using an existing attaching-and-detaching device. A lid unit for closing a container body of a thin-plate supporting container for use in storing semiconductor wafers therein is provided. A simplified attaching-and-detaching mechanism allows the lid unit to be attached and detached by easy locking and unlocking with respect to the container body. The simplified attaching-and-detaching mechanism includes a locking member engageable with a second receiving device of the container body, and a guiding member disposed at the extremity of the locking member, which guiding member reaches the second receiving device and guides the locking member into the second receiving device in a state in which the main body fits lightly in the container body. The guiding member includes a reaching portion that first reaches the second receiving device, and a guiding portion that guides the locking member to the second receiving device.

1 . A lid unit for a thin-plate supporting container for closing a container body of a thin-plate supporting container to be transported with thin-plates received therein, the lid unit comprising: 
 a simplified attaching-and-detaching mechanism provided in a main body of the lid unit, which constitutes an outer shell of the lid unit, and allowing the lid unit to be attached and detached by locking and unlocking with respect to the container body;    wherein the simplified attaching-and-detaching mechanism comprises a locking member extending from the main body engageable with a receiving device on the container body, and a guiding member disposed at the extremity of the locking member that reaches the receiving device in a state in which the main body fits lightly in the container body, and guides the locking member into the receiving device;    the guiding member comprises a reaching portion that first reaches the receiving device when the locking member extends toward the receiving device in a state in which the main body lightly fits in the container body, and a guiding portion that guides the locking member to the receiving device as the locking member extends, subsequently to reaching of the reaching portion to the receiving device;    the reaching portion includes a projection located at a position on the extremity of the locking member shifted inwardly of the container body;    the guiding portion includes a bevel provided to connect the reaching portion and the locking member; and    the surface of the bevel of the guiding portion is formed from any one of a single sliding synthetic resin and the sliding synthetic resin incorporated with a sliding agent.    
   
   
       2 . The lid unit for the thin-plate supporting container according to  claim 1 , wherein the sliding synthetic resin is a fluoride synthetic resin.  
   
   
       3 . The lid unit for the thin-plate supporting container according to  claim 2 , wherein the fluoride synthetic resin includes any one of PTFE, PFA, and ETFE.  
   
   
       4 . The lid unit for the thin-plate supporting container according to  claim 1 , wherein the sliding agent includes at least one selected from the group consisting of PTFE, PFA, silicon, glass fiber, carbon fiber, graphite, DLC, and molybdenum disulfide.  
   
   
       5 . The lid unit for the thin-plate supporting container according to  claim 1 , wherein the sliding surfaces of the respective sliding portions of the simplified attaching-and-detaching mechanism are formed from any one of a single sliding synthetic resin and the sliding synthetic resin incorporated with a sliding agent.  
   
   
       6 . The lid unit for the thin-plate supporting container according to  claim 5 , wherein the sliding synthetic resin is a fluoride synthetic resin.  
   
   
       7 . The lid unit for the thin-plate supporting container according to  claim 6 , wherein the fluoride synthetic resin includes any one of PTFE, PFA, and ETFE.  
   
   
       8 . The lid unit for the thin-plate supporting container according to  claim 5 , wherein the sliding agent includes at least one selected from the group consisting of PTFE, PFA, silicon, glass fiber, carbon fiber, graphite, DLC, and molybdenum disulfide.  
   
   
       9 . The lid unit for the thin-plate supporting container according to  claim 1 , further comprising a thin-plate holding member arranged in such a manner that a V-shaped groove fits, presses and supports the thin plate received in the container body, 
 wherein the surfaces of the bevels of the V-shaped groove of the thin-plate holding member are formed from any one of a single sliding synthetic resin and the sliding synthetic resin incorporated with a sliding agent.    
   
   
       10 . The lid unit for the thin-plate supporting container according to  claim 9 , wherein the sliding synthetic resin is a fluoride synthetic resin.  
   
   
       11 . The lid unit for the thin-plate supporting container according to  claim 10 , wherein the fluoride synthetic resin includes any one of PTFE, PFA, and ETFE.  
   
   
       12 . The lid unit for the thin-plate supporting container according to  claim 9 , wherein the sliding agent includes at least one selected from the group consisting of PTFE, PFA, silicon, glass fiber, carbon fiber, graphite, DLC, and molybdenum disulfide.