Ceramic sprayed member-cleaning method, program for implementing the method, storage medium storing the program, and ceramic sprayed member

Abstract

A ceramic sprayed member-cleaning method which is capable of reliably suppressing desorption and attachment of water. The surface of a ceramic sprayed member and water are chemically bonded to each other, whereby the water is stabilized. Water physically adsorbed on the surface of the ceramic sprayed member is desorbed.

1 . A method of cleaning a ceramic sprayed member having a predetermined ceramic material thermally sprayed on a surface thereof, comprising: 
 a stabilizing step of chemically bonding the surface of the ceramic sprayed member and water to each other to stabilize the water; and    a desorbing step of desorbing water physically adsorbed on the surface of the ceramic sprayed member.    
   
   
       2 . A method as claimed in  claim 1 , wherein said stabilizing step comprises carrying out hydration processing in which the ceramic sprayed member is exposed to a high-pressure, high-humidity, and high-temperature environment.  
   
   
       3 . A method as claimed in  claim 1 , wherein said stabilizing step comprises forming a layer mainly composed of a hydroxide of ceramic on the surface of the ceramic sprayed member.  
   
   
       4 . A method as claimed in  claim 1 , wherein said desorbing step comprises heating the ceramic sprayed member.  
   
   
       5 . A method as claimed in  claim 1 , further comprising a removing step of removing deposits attached to the ceramic sprayed member, before execution of said stabilizing step.  
   
   
       6 . A method as claimed in  claim 5 , wherein said removing step comprises at least soaking of the ceramic sprayed member in an organic solvent or acid.  
   
   
       7 . A method as claimed in  claim 1 , wherein the ceramic material comprises a rare earth metal oxide.  
   
   
       8 . A method as claimed in  claim 7 , wherein the rare earth metal oxide comprises yttria.  
   
   
       9 . A method as claimed in  claim 1 , wherein the ceramic sprayed member is used in a processing chamber for processing substrates.  
   
   
       10 . A ceramic sprayed member comprising: 
 a base material;    a surface layer formed by thermally spraying a predetermined ceramic material onto a surface of said base material, said surface layer containing a compound having a hydroxyl group,    wherein water physically adsorbed on a surface of said surface layer has been desorbed.    
   
   
       11 . A ceramic sprayed member comprising: 
 a base material;    a surface layer formed by thermally spraying a predetermined ceramic material onto a surface of said base material, said surface layer containing a compound having a hydroxyl group,    wherein an amount of water released from said surface layer by evacuation carried out for a predetermined time period at room temperature is not larger than 1.0×10 16 /cm 2 .    
   
   
       12 . A ceramic sprayed member comprising: 
 a base material; a surface layer formed by thermally spraying a predetermined ceramic material onto a surface of said base material, said surface layer containing a compound having a hydroxyl group,    wherein no O—H bond in a H 2 O structure is detected from said surface layer.    
   
   
       13 . A ceramic sprayed member as claimed in  claim 10 , wherein the compound having a hydroxyl group is a hydroxide of the predetermined ceramic material.  
   
   
       14 . A ceramic sprayed member as claimed in  claim 10 , wherein the ceramic comprises a rare earth metal oxide.  
   
   
       15 . A ceramic sprayed member as claimed in  claim 14 , wherein the rare earth metal oxide comprises yttria.  
   
   
       16 . A ceramic sprayed member as claimed in  claim 10 , wherein the ceramic sprayed member is used in a processing chamber for processing substrates.  
   
   
       17 . A computer-readable program for causing a computer to execute a method of cleaning a ceramic sprayed member having a predetermined ceramic material thermally sprayed on a surface thereof, comprising: 
 a stabilizing module for chemically bonding the surface of the ceramic sprayed member and water to each other to stabilize the water; and    a desorbing module for desorbing water physically adsorbed on the surface of the ceramic sprayed member.    
   
   
       18 . A program as claim in  claim 17 , wherein said stabilizing module carries out hydration processing in which the ceramic sprayed member is exposed to a high-pressure, high-humidity, and high-temperature environment.  
   
   
       19 . A program as claim in  claim 17 , wherein said stabilizing module forms a layer mainly composed of a hydroxide of ceramic on the surface of the ceramic sprayed member.  
   
   
       20 . A program as claim in  claim 17 , wherein said desorbing module heats the ceramic sprayed member.  
   
   
       21 . A program as claim in  claim 17 , further comprising a removing module for removing deposits attached to the ceramic sprayed member, said stabilizing module forms the layer mainly composed of a hydroxide of ceramic on the surface of the ceramic sprayed member.  
   
   
       22 . A program as claim in  claim 21 , wherein said removing module carries out at least soaking of the ceramic sprayed member in an organic solvent or acid.  
   
   
       23 . A storage medium storing a computer-readable program for causing a computer to execute a method of cleaning a ceramic sprayed member having a predetermined ceramic material thermally sprayed on a surface thereof, the program comprising: 
 a stabilizing module for chemically bonding the surface of the ceramic sprayed member and water to each other to stabilize the water; and    a desorbing module for desorbing water physically adsorbed on the surface of the ceramic sprayed member.    
   
   
       24 . A storage medium as claim in  claim 23 , wherein said stabilizing module carries out hydration processing in which the ceramic sprayed member is exposed to a high-pressure, high-humidity, and high-temperature environment.  
   
   
       25 . A storage medium as claim in  claim 23 , wherein said stabilizing module forms a layer mainly composed of a hydroxide of ceramic on the surface of the ceramic sprayed member.  
   
   
       26 . A storage medium as claim in  claim 23 , wherein said desorbing module heats the ceramic sprayed member.  
   
   
       27 . A storage medium as claim in  claim 23 , further comprising a removing module for removing deposits attached to the ceramic sprayed member, said stabilizing module forms the layer mainly composed of a hydroxide of ceramic on the surface of the ceramic sprayed member.  
   
   
       28 . A storage medium as claim in  claim 27 , wherein said removing module carries out at least soaking of the ceramic sprayed member in an organic solvent or acid.