Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof

Abstract

The present invention is a cooling plate including a groove, which becomes a passage of a coolant, inside a body, wherein one or more fins are provided inside the groove, wherein the groove is covered with a lid having width larger than the groove, wherein the lid is joined to the body by friction stir welding, and wherein a weld bead formed by: the joining is outside the passage, and the weld bead formed by the joining is formed within the body and further, is characterized by a manufacturing method of a cooling plate that has a first groove, which becomes a passage of a coolant, and a second groove, which has width larger than the first groove and receives a lid on the first groove, inside a body, receives the lid on the second groove, and is joined to the body, the manufacturing method of a cooling plate wherein, while the lid and the body are joined together by the friction stir welding owing to insertion of a-rotation tool having a shoulder and a pin, the joining is performed so that a weld bead formed by the joining may become out of the passage, and furthermore, is characterized in that a target for sputtering is joined to the cooling plate.

1 . A cooling plate comprising: 
 a body having a groove which becomes a coolant passage; and    a lid having a width larger than a width of the groove so that the body and the lid have a socket-and-spigot structure;    wherein the body and the lid are joined to each other by friction stir welding;    wherein a weld bead formed by the friction stir welding is outside the groove; and    wherein a center of the weld bead is positioned at a distance from the groove at least equal to a width of the socket-and-spigot structure which is half of a width difference between the lid and the groove.