Chemical mixing apparatus, system and method

Abstract

There is disclosed a system and method of formulating a batch comprising at least two ingredients. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Another enhancement disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode which allows for the elimination of a tank. This approach will allow for “one pass” blending with control. Feedback control can be provided via process indicators or through analytical or parametric methods. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.

1 - 29 . (canceled)  
   
   
       30 . A method of producing a composition, the composition comprising two or more components, the method comprising: 
 obtaining a total flow rate for the composition;    determining the flow rate for each component, wherein the sum of the flow rates for each component equals the total flow rate, and wherein the flow rate of each component is determined based on a predetermined composition formulation;    initiating flow of each component into a mixing area, wherein each component is flowed at the determined flow rate, and wherein the components are combined in the mixing area to produce the composition;    transferring the composition into an analyzer, wherein the analyzer is configured to measure the concentration of one or more components of the composition;    transferring the composition to a process tool if one or more components of the composition is within a predetermined concentration range.    
   
   
       31 . The method of  claim 30 , wherein the total flow rate is a total flow rate of the composition required by a process tool.  
   
   
       32 . The method of  claim 31 , wherein the process tool is a semiconductor fabrication tool.  
   
   
       33 . Method of  claim 30 , wherein the composition is produced as a continuously flowing composition.  
   
   
       34 . Method of  claim 30 , wherein the composition comprises a solution of two or more components.  
   
   
       35 . The method of  claim 30 , wherein composition formulation comprises a weight percentage of each component.  
   
   
       36 . The method of  claim 30 , wherein the composition comprises an aqueous solution of two or more components.  
   
   
       37 . The method of  claim 30 , wherein the components comprise one or more inorganic bases.  
   
   
       38 . The method of  claim 30 , wherein the components comprise one or more mineral acids.  
   
   
       39 . The method of  claim 30 , wherein the components comprise hydrogen peroxide.  
   
   
       40 . The method of  claim 30 , wherein the analyzer comprises a spectral absorption analytical device.  
   
   
       41 . The method of  claim 30 , wherein the analyzer comprises a conductance measurement device.  
   
   
       42 . The method of  claim 30 , wherein the composition, after passing through the analyzer is passed to a waste drain if one or more of the components are not within a predetermined concentration range.  
   
   
       43 . The method of  claim 30 , further comprising determining error correction values if one or more components are not within a predetermined concentration range.  
   
   
       44 . The method of  claim 30 , wherein determining the flow rate for each component comprises using one or more error correction values to determine the flow rate, wherein the one or more error correction values are obtained from previous use of the system.  
   
   
       45 . The method of  claim 30 , further comprising adjusting the flow rate of one or more components based on the measured concentration of the one or more components.  
   
   
       46 . The method of  claim 30 , further comprising adjusting the flow rate of each of the components if one or more components of the composition are not within a predetermined concentration range.  
   
   
       47 . A computer readable medium having stored thereon computer executable instructions, readable by a controller for a chemical mixing system, wherein the computer executable instructions are for performing a method comprising: 
 obtaining a total flow rate for the composition;    determining the flow rate for each component, wherein the sum of the flow rates for each component equals the total flow rate, and wherein the flow rate of each component is determined based on a predetermined composition formulation;    initiating flow of each component into a mixing area, wherein each component is flowed at the determined flow rate, and wherein the components are combined in the mixing area to produce the composition;    transferring the composition into an analyzer, wherein the analyzer is configured to measure the concentration of one or more components of the composition;    transferring the composition to a process tool if one or more components of the composition is within a predetermined concentration range.    
   
   
       48 - 63 . (canceled)  
   
   
       64 . An apparatus for preparing a composition, comprising: 
 a mixing area;    at least two chemical dispensing devices, each chemical dispensing device having an input and an output, each input coupled to a chemical supply and each output coupled to the mixing area;    an analytical device configured to measure the quantities of one or more ingredients in a composition, wherein the analytical device is coupled to the mixing area, and wherein the composition produced in the mixing area flows into the analytic device from the mixing area; and    a controller coupled to the chemical dispensing devices and the analytical instrument, wherein the controller is configured to perform the method comprising: 
 obtaining a total flow rate for the composition;  
 determining the flow rate for each component, wherein the sum of the flow rates for each component equals the total flow rate, and wherein the flow rate of each component is determined based on a predetermined composition formulation;  
 initiating flow of each component into a mixing area, wherein each component is flowed at the determined flow rate, and wherein the components are combined in the mixing area to produce the composition;  
 transferring the composition into an analyzer, wherein the analyzer is configured to measure the concentration of one or more components of the composition;  
 transferring the composition to a process tool if one or more components of the composition is within a predetermined concentration range.  
   
   
   
       65 - 80 . (canceled)