Electrochemical processing apparatus and method

Abstract

A processing apparatus electrochemically processes part of a first surface of a member having the first surface and a second surface. The processing apparatus includes a support which supports the member to expose the first surface, a first electrode which is arranged to oppose a first portion of the first surface, a second electrode which is arranged to oppose a second portion of the first surface, a third electrode which applies a potential to the member from a second surface side, and a processing bath to fill a space defined by the first and second electrodes and the member with a processing liquid.

1 . A processing apparatus for electrochemically partially processing a first surface of a member having the first surface and a second surface, the apparatus comprising: 
 a support which supports the member to expose the first surface;    a first electrode which is arranged to oppose a first portion of the first surface;    a second electrode which is arranged to oppose a second portion of the first surface;    a third electrode which applies a potential to the member from a second surface side; and    a processing bath to fill a space defined by said first and second electrodes and the member with a processing liquid.    
   
   
       2 . The apparatus according to  claim 1 , wherein said first and second electrodes are arranged such that a distance between said second electrode and the second portion of the first surface is smaller than that between said first electrode and the first portion of the first surface.  
   
   
       3 . The apparatus according to  claim 1 , further comprising a power supply which provides a potential to said first, second, and third electrodes, wherein said power supply is configured to decrease an electric field intensity between said second and third electrodes to be lower than that between said first and third electrodes.  
   
   
       4 . The apparatus according to  claim 1 , wherein the first portion comprises a region to be electrochemically processed, and the second portion comprises a region not to be electrochemically processed.  
   
   
       5 . The apparatus according to  claim 1 , wherein said first and second electrodes are arranged at such positions not to be in contact with the member.  
   
   
       6 . The apparatus according to  claim 1 , wherein the member is supported to expose the first surface entirely.  
   
   
       7 . A processing method of electrochemically processing part of a first surface of a member having the first surface and a second surface, the method comprising: 
 a step of arranging the member such that a first electrode opposes a first portion of the first surface, that a second electrode opposes a second portion of the first surface, and that a third electrode applies a potential to the member from a second surface side; and    a step of processing the member while applying a potential to the first, second, and third electrodes.    
   
   
       8 . The method according to  claim 7 , wherein the first and second surfaces are processed with different chemical liquids.  
   
   
       9 . A method of manufacturing a member having first and second surfaces, the method comprising: 
 a step of arranging the member such that a first electrode opposes a first portion of the first surface, that a second electrode opposes a second portion of the first surface, and that a third electrode applies a potential to the member from a second surface side; and    a step of electrochemically processing the member while applying a potential to the first, second, and third electrodes.