Wafer shipping box and wafer transportation method

Abstract

A wafer shipping box for carrying a number of wafers is provided. The wafer shipping box includes a main body, a cover and a sealing element. The cover can join up with the main body to seal off wafers inside the wafer shipping box. A vent hole is set up on either the body or the cover. The sealing element is used to seal or open the vent hole. Through the sealing element, the vent hole can be sealed so that micro-particles and corrosive gases are prevented from contaminating the wafers and the interior of the wafer box during shipment.

1 . A wafer shipping box for carrying a plurality of wafers, comprising: 
 a main body having a plurality of wafer supporting structures for carrying wafers;    a cover for engaging with the main body so that the wafers are enclosed, wherein a vent hole is disposed on the main body or the cover; and    a sealing element for sealing and unsealing the vent hole.    
   
   
       2 . The wafer box of  claim 1 , wherein the wafers comprise 12-inch diameter wafers.  
   
   
       3 . The wafer box of  claim 1 , wherein the box further comprises a filtering device disposed on the vent hole.  
   
   
       4 . The wafer box of  claim 1 , wherein the sealing element comprises a piece of plastic tape.  
   
   
       5 . The wafer box of  claim 1 , wherein the sealing element comprises a sheath.  
   
   
       6 . The wafer box of  claim 1 , wherein the sealing element comprises a cap.  
   
   
       7 . The wafer box of  claim 6 , wherein the vent hole has external screw threads and the cap has matching internal screw threads so that the cap can be screwed into the vent hole to seal off the wafer box.  
   
   
       8 . The wafer box of  claim 1 , wherein the sealing element comprises a plug.  
   
   
       9 . The wafer box of  claim 8 , wherein the vent hole has internal screw threads and the plug has external screw threads so that the plug can be screwed into the vent hole to seal off the wafer box.  
   
   
       10 . The wafer box of  claim 1 , wherein the sealing element further comprises a connective line that links the sealing element to the vent hole.  
   
   
       11 . A method of transporting wafer, comprising the steps of: 
 placing a plurality of wafers into a wafer shipping box in a first environment, wherein the wafer shipping box has a vent hole;    sealing the vent hole with a sealing element while the wafer shipping box is still in the first environment;    transporting the wafer shipping box from the first environment to a second environment; and    unsealing the sealing element and opening the wafer shipping box after the air pressure between the interior and exterior of the box are equalized.    
   
   
       12 . The method of  claim 11 , wherein the wafers comprises 12-inch diameter wafers.  
   
   
       13 . The method of  claim 11 , wherein the wafer shipping box further comprises a filtering device disposed on the vent hole.  
   
   
       14 . The method of  claim 11 , wherein the sealing element comprises a piece of plastic tape.  
   
   
       15 . The method of  claim 11 , wherein the sealing element comprises a sheath.  
   
   
       16 . The method of  claim 11 , wherein the sealing element comprises a cap.  
   
   
       17 . The method of  claim 16 , wherein the vent hole has external screw threads and the cap has matching internal screw threads so that the cap can be screwed into the vent hole to seal off the wafer shipping box.  
   
   
       18 . The method of  claim 11 , wherein the sealing element comprises a plug.  
   
   
       19 . The method of  claim 18 , wherein the vent hole has internal screw threads and the plug has matching external screw threads so that the plug can be screwed into the vent hole to seal off the wafer shipping box.  
   
   
       20 . The method of  claim 11 , wherein the wafer shipping box further comprises a connective line linking the sealing element to the vent hole.