Data sharing and networking system for integrated remote tool access, data collection and control

Abstract

A data brokering system for semiconductor wafer data is presented that comprises: a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMs, coupled to the FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by the tool to one of the OEMs without revealing information about the tool; and means for collecting fees based on characteristics of the provided data.

1 . A data-sharing system comprising: 
 one or more automated manufacturing tools capable of supplying data regarding the operation and status of said tools as well as various parameters regarding the object being manufactured by said tool;    one or more filters, corresponding to said one or more tools, operative on said data supplied by said tool to separate tool-specific data from data regarding said manufactured object;    a database, for storing said data regarding said manufactured object;    a facility for allowing the retrieval of said data regarding said manufactured object from said database; and    a facility for imposing a fee for said retrieval of said data, said fee being based on the content of said data.    
   
   
       2 . The system of  claim 1  wherein said facility for allowing retrieval of said data comprises a facility for generating and displaying a list having available data items and their associated fees for retrieval.  
   
   
       3 . The system of  claim 2  wherein said data is retrieved through a secure connection on a network.  
   
   
       4 . The system of  claim 2  further comprising a facility for enforcing data access restrictions in said database.  
   
   
       5 . The system of  claim 1  wherein said data is converted to XML before being retrieved.  
   
   
       6 . The system of  claim 1  wherein said fee is calculated base on one or more of criteria selected from a group consisting of size of data, type of data and type of manufactured object.  
   
   
       7 . The system of  claim 1  further comprising a facility for automatically sending said filtered data to a software application for processing.  
   
   
       8 . The system of  claim 7  wherein said software application is able to adjust the operating parameters of said automated manufacturing tool.