Cross-linked elastomer composition and formed product composed of such cross-linked elastomer composition

Abstract

There is provided a crosslinkable elastomer composition, which has small decrease in weight to all of high concentration F radical irradiation, O 2 plasma treatment and fluorine plasma treatment which are conducted in a semiconductor manufacturing process and significant plasma resistance, and a molded article comprising the crosslinkable elastomer composition.

1 . A crosslinkable elastomer composition for plasma process comprising a crosslinkable elastomer and a carbon fluoride filler.  
   
   
       2 . The crosslinkable elastomer composition of  claim 1 , which further comprises a silicic compound inorganic filler and/or a filler comprising a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain.  
   
   
       3 . The crosslinkable elastomer composition of  claim 2 , wherein said synthetic polymer having a thermally and chemically stable aromatic ring in the main chain is a synthetic polymer having an amide bond or an imide bond in the main chain.  
   
   
       4 . The crosslinkable elastomer composition of  claim 2 , wherein said silicic compound inorganic filler has average particle size of at most 0.5 μm.  
   
   
       5 . The crosslinkable elastomer composition of  claim 2 , wherein said filler comprising a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain has specific surface area of at least 0.5 m 2 /g.  
   
   
       6 . The crosslinkable elastomer composition of  claim 1 , wherein said carbon fluoride filler is heat treated at 300 to 550° C. in advance.  
   
   
       7 . The crosslinkable elastomer composition of  claim 1 , wherein said crosslinkable elastomer is a perfluoro elastomer.  
   
   
       8 . A molded article for plasma process comprising the crosslinkable elastomer composition of  claim 1 .  
   
   
       9 . A sealing material for plasma process comprising the crosslinkable elastomer composition of  claim 1.