Retainer, exposure apparatus, and device fabrication method

Abstract

A retainer includes a plurality of support members for supporting an optical element, and a plurality of elastic members arranged between the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.

1 . A retainer comprising: 
 a plurality of support members for supporting an optical element; and    a plurality of elastic members arranged among the plurality of support members, each elastic member applying an elastic force to the optical element in a direction perpendicular to a gravity direction.    
   
   
       2 . A retainer according to  claim 1 , wherein the direction perpendicular to the gravity direction is a radial direction of the optical element.  
   
   
       3 . A retainer according to  claim 1 , wherein said elastic member applies a compression force to the optical element towards a central of the optical element.  
   
   
       4 . A retainer according to  claim 2 , wherein said elastic member applies the elastic force to the optical element in a direction opposing to the gravity direction.  
   
   
       5 . (canceled)  
   
   
       6 . (canceled)  
   
   
       7 . (canceled)  
   
   
       8 . (canceled)  
   
   
       9 . A retainer according to  claim 1 , wherein the optical element is one of a lens, a mirror, and a filter.  
   
   
       10 . (canceled)  
   
   
       11 . (canceled)