Particle filter for microelectromechanical systems

Abstract

A particle filter for microelectromechanical systems is provided that includes a particle trap formed on a substrate material. The particle trap includes an array of multidimensional geometric structures in an adjacent relationship. The geometric structures further define a plurality of multidimensional voids therebetween for trapping particles therein. The individual multidimensional geometric structures are formed by a plurality of vertically interconnected geometric shapes to define different configurations of voids between the adjacent geometric structures. In one embodiment of the filter system, an electrical bias is applied to the array of multidimensional geometric structures to facilitate attracting and trapping of particles in the filter.

1 . A particle filter for a microelectromechanical system, the particle filter comprising: 
 a substrate material; and    a particle trap formed on the substrate material for trapping particles that are undesired in the vicinity of the microelectromechanical system; and    an electrical structure formed on the substrate material to electrically bias at least a portion of the particle trap.    
   
   
       2 . (canceled)  
   
   
       3 . The particle filter of  claim 1  wherein the electrical structure comprises: 
 an electrical bus interconnecting the plurality of adjacent geometric structures to an electrical source.    
   
   
       4 . The particle filter of  claim 1  wherein the particle trap comprises: 
 a plurality of vertically interconnected geometric shapes.    
   
   
       5 . The particle filter of  claim 1  wherein the particle trap includes a plurality of voids defined by a plurality of adjacent geometric structures, said voids being substantially frusta conical.  
   
   
       6 . The particle filter of  claim 1  wherein the particle trap is on the substrate material in areas void of other micro-devices.  
   
   
       7 . The particle filter of  claim 1  wherein the particle trap includes a plurality of geometric structures that are adjacent but non-interconnected.  
   
   
       8 . A microelectromechanical system comprising 
 a substrate material;    at least one micro-device formed on the substrate material;    at least one particle trap formed on the substrate material in an area void of the at least one micro-device for trapping particles that are undesired in the vicinity of the microelectromechanical system; and    an electrical structure formed no the substrate material to electrically bias at least a portion of the particle trap.    
   
   
       9 . The system of  claim 8  comprising: 
 a plurality of particle traps formed on the substrate material in areas void of the at least one micro-device, wherein each of the plurality of particle traps comprises:    a plurality of multidimensional geometric structures in an adjacent relationship, wherein the plurality of multidimensional geometric structures define a plurality of multidimensional voids therebetween for trapping particles therein.    
   
   
       10 . (canceled)  
   
   
       11 . The system of  claim 9  wherein the electrical structure comprises: 
 an electrical bus interconnecting the plurality of adjacent geometric structures to an electrical source.    
   
   
       12 . The system of  claim 9  wherein the plurality of geometric structures each comprise: 
 a plurality of vertically interconnected geometric shapes.    
   
   
       13 . The system of  claim 9  wherein the plurality of voids defined by the plurality of adjacent geometric structures are substantially frusta conical.  
   
   
       14 . The system of  claim 9  wherein the plurality of geometric structures are adjacent but non-interconnected.  
   
   
       15 . A particle filter for a microelectromechanical system, the particle filter comprising: 
 a substrate material; and    a particle trap formed on the substrate material for trapping particles that are undesired in the vicinity of the microelectromechanical system; and    an electrical layer formed on the substrate, interconnecting the plurality of geometric structures to an electrical source to apply an electrical bias to the plurality of geometric structures.    
   
   
       16 . The particle filter of  claim 15  wherein the particle trap includes a plurality of geometric structures defining a plurality with voids for trapping particles said plurality of geometric structures comprising 
 a plurality of vertically interconnected geometric shapes.    
   
   
       17 . The particle filter of  claim 16  wherein the plurality of voids defined by the plurality of adjacent geometric structures are substantially frusta conical.  
   
   
       18 . The particle filter of  claim 16  wherein the plurality of adjacent geometric structures are formed on the substrate material in areas void of other micro-devices.  
   
   
       19 . The particle filter of  claim 16  wherein the plurality of geometric structures are adjacent but non-interconnected.  
   
   
       20 . The particle filter of  claim 16  wherein the electrical layer comprises: 
 an electrical bus interconnecting the plurality of adjacent geometric structures.    
   
   
       21 . (canceled)  
   
   
       22 . (canceled)  
   
   
       23 . (canceled)  
   
   
       24 . (canceled)  
   
   
       35 . (canceled)  
   
   
       26 . (canceled)  
   
   
       27 . (canceled)  
   
   
       28 . A method for use in filtering particles in a vicinity of a microelectromechanical system, comprising the steps of: 
 providing a micro-device on a substrate;    disposing at least one particle trap on said substrate in an areas separate from said micro-device; and    electrically biasing said particle trap so as to attract particles to said particular filter.    
   
   
       29 . A method as set forth in  claim 28  wherein said step of disposing comprises disposing a plurality of filters on said substrate in said area.