US2006043346A1PendingUtilityA1

Precursor compositions for the deposition of electrically conductive features

48
Individually held — no corporate assignee on recordPriority: Oct 5, 2001Filed: Aug 12, 2005Published: Mar 2, 2006
Est. expiryOct 5, 2021(expired)· nominal 20-yr term from priority
Inventors:Toivo T. KodasMark J. Hampden-SmithKarel VanheusdenHugh DenhamAaron D. StumpAllen B. SchultPaolina AtanassovaKlaus Kunze
H10P 14/46H01C 17/06506C23C 18/08H05K 3/105C09D 11/30H01C 17/06573H01C 17/06533H01B 1/026H05K 1/097
48
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Claims

Abstract

A precursor composition for the deposition and formation of an electrical feature such as a conductive feature. The precursor composition advantageously has a viscosity of at least about 1000 centipoise and can be deposited by screen printing. The precursor composition also has a low conversion temperature, enabling the deposition and conversion to an electrical feature on low temperature substrates. A particularly preferred precursor composition includes silver and/or copper metal for the formation of highly conductive features.

Claims

exact text as granted — not AI-modified
1 . A metal precursor composition having a viscosity of at least about 1000 centipoise, comprising: 
 a. a metal precursor compound; and    b. a conversion reaction inducing agent in an amount sufficient to reduce the conversion temperature of said metal precursor composition by at least about 25° C. as compared to the dry metal precursor compound, wherein said conversion temperature is not greater than about 200°   
   
   
       2 . A metal precursor composition as recited in  claim 1 , wherein said viscosity is at least about 5000 centipoise.  
   
   
       3 . A metal precursor composition as recited in  claim 1 , wherein said viscosity is at least about 10,000 centipoise.  
   
   
       4 . A metal precursor composition as recited in  claim 1 , wherein said metal precursor compound is a metal carboxylate compound.  
   
   
       5 . A metal precursor composition as recited in  claim 1 , wherein said metal precursor compound is a halogenated metal carboxylate compound.  
   
   
       6 . A metal precursor composition as recited in  claim 1 , wherein said metal precursor compound is a metal oxide.  
   
   
       7 . A metal precursor composition as recited in  claim 1 , wherein said metal precursor compound is an inorganic metal compound.  
   
   
       8 . A metal precursor composition as recited in  claim 1 , wherein said metal precursor compound is silver trifluoroacetate.  
   
   
       9 . A metal precursor composition as recited in  claim 1 , further comprising a crystallization inhibitor.  
   
   
       10 . A metal precursor composition as recited in  claim 1 , further comprising a crystallization inhibitor that is lactic acid.  
   
   
       11 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent is a liquid that functions as a vehicle for said metal precursor composition.  
   
   
       12 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent is a liquid that functions as a solvent for said metal precursor compound.  
   
   
       13 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent is selected from the group consisting of alcohols, amines, amides, boranes, borohygrates, borohydrides and organosilanes.  
   
   
       14 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent comprises diethyleneglycol butylether (DEGBE).  
   
   
       15 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent comprises terpineol.  
   
   
       16 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent comprises N,N-dimethyl acetamide (DMAc).  
   
   
       17 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent comprises diethyleneglycol butylether (DEGBE) and N,N-dimethyl acetamide (DMAc).  
   
   
       18 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent comprises N,N-dimethyl acetamide (DMAc) and terpineol.  
   
   
       19 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent comprises a palladium compound.  
   
   
       20 . A metal precursor composition as recited in  claim 1 , wherein said conversion reaction inducing agent is selected from the group consisting of palladium acetate and palladium triflouroacetate.  
   
   
       21 . A metal precursor composition as recited in  claim 1 , wherein said conversion reducing agent comprises diethyleneglycol butylether (DEGBE) and the molar ratio of DEGBE to said metal carboxylate compound is from about 0.75 to about 1.25.  
   
   
       22 . A metal precursor composition as recited in  claim 1 , further comprising a vehicle.  
   
   
       23 . A metal precursor composition as recited in  claim 1 , further comprising a solvent, wherein said metal precursor compound is dissolved in said solvent.  
   
   
       24 . A metal precursor composition as recited in  claim 1 , further comprising water as a solvent.  
   
   
       25 . A metal precursor composition as recited in  claim 1 , further comprising particles.  
   
   
       26 . A metal precursor composition as recited in  claim 1 , further comprising substantially spherical particles.  
   
   
       27 . A metal precursor composition as recited in  claim 1 , further comprising micron size particles having an average particles size of from about 0.1 μm to about 10 μm.  
   
   
       28 . A metal precursor composition as recited in  claim 1 , further comprising metallic particles.  
   
   
       29 . A metal precursor composition as recited in  claim 1 , further comprising silver metal particles.  
   
   
       30 . A metal precursor composition as recited in  claim 1 , further comprising nanoparticles having a volume median particle size of not greater than 100 nanometers.  
   
   
       31 . A metal precursor composition as recited in  claim 1 , wherein said precursor composition comprises said conversion reaction inducing agent in an amount sufficient to reduce the conversion temperature of said metal precursor compound by at least about 50° C.  
   
   
       32 . A metal precursor composition as recited in  claim 1 , wherein said precursor composition comprises said conversion reaction inducing agent in an amount sufficient to reduce the conversion temperature of said metal precursor compound by at least about 100° C.  
   
   
       33 - 64 . (canceled)

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