Thin plate supporting container

Abstract

Particle adhesion to a gap between a container main body and a lid unit is reduced to prevent the particle intrusion into the container main body. The inside of a thin plate supporting container is kept clean, and semiconductor wafers and the like are stored in the thin plate supporting container. The thin plate supporting container includes the container main body in which the semiconductor wafers are stored and the lid unit which blocks the container main body. In the thin plate supporting container, a protection film is provided while the gap between the lid unit and the container main body is covered with the protection film. Adhesion properties are imparted to the protection film, so that the protection film is easy to attach and detach. The protection film is formed in a size in which the entire side surface of the lid unit of the container main body is covered with the protection film. The lid unit is attached to the entire side surface of the container main body. The particles are prevented from intruding into the gap between the lid unit and the container main body by bonding the protection film. Therefore, the particles are prevented from intruding into the container main body along with the entrained air when the lid unit is detached from the container main body.

1 . A thin plate supporting container which stores thin-plates therein while the inside of the container is kept clean, the container comprising: 
 a container main body in which the thin-plates are stored; and    a lid unit which blocks the container main body,    wherein a protection film is provided while a gap between the lid unit and the container main body is covered with the protection film.    
   
   
       2 . A thin plate supporting container according to  claim 1 , wherein adhesion properties are imparted to the protection film such that the protection film is attachable to and detachable from the lid unit and the container main body.  
   
   
       3 . A thin plate supporting container according to  claim 1 , wherein the protection film covers the entire side surface of the lid unit in the container main body to which the lit unit is attached.  
   
   
       4 . A thin plate supporting container according to  claim 1 , wherein the protection film covers the entire perimeter of the gap between the lid unit and the container main body in the container main body to which the lid unit is attached.  
   
   
       5 . A thin plate supporting container according to  claim 2 , wherein the protection film covers the entire side surface of the lid unit in the container main body to which the lit unit is attached.  
   
   
       6 . A thin plate supporting container according to  claim 2 , wherein the protection film covers the entire perimeter of the gap between the lid unit and the container main body in the container main body to which the lid unit is attached.