US2006007532A1PendingUtilityA1

Catadioptric optical system and exposure apparatus having the same

41
Individually held — no corporate assignee on recordPriority: Jul 29, 1998Filed: Sep 13, 2005Published: Jan 12, 2006
Est. expiryJul 29, 2018(expired)· nominal 20-yr term from priority
Inventors:David Shafer
G02B 13/143G02B 17/08G03F 7/70225G02B 17/0892G03F 7/70275
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Claims

Abstract

A projection exposure lens system has an object side catadioptric system, an intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

Claims

exact text as granted — not AI-modified
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         22 . A projection exposure lens system comprising a both side telecentric refractive lens system with a numerical aperture of at least 0.7, with a first lens not immediately next to, but spaced one apart from its image plane and a second lens next to its image plane, said first lens being concave on its image ward surface, said second lens being convex on its surface facing said first lens, said concave surface and said convex surface being substantially concentric.  
     
     
         23 . A system according to  claim 22 , said first lens being a meniscus lens.  
     
     
         24 . A system according to  claim 22 , said second lens being a plano-convex lens.  
     
     
         25 . A system according to  claim 22 , said first lens and said second lens both being of the same material.  
     
     
         26 . A system according to  claim 25 , said material being CaF 2 .  
     
     
         27 . A system according to  claim 22 , an axial distance between said first and second lens being of the order of magnitude of one millimeter.  
     
     
         28 . A system according to  claim 22 , a difference of ratio of said concave and said convex surface being of the order of magnitude of one millimeter.  
     
     
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