Method and system to control movement of a body for nano-scale manufacturing

Abstract

The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom.

1 . A method of controlling movement of a body coupled to an actuation system, said method comprising: 
 imparting angular motion in said actuation system, coupled to said body, with respect to two spaced-apart axes to generate translational motion of said body in a translation plane, with said translation plane extending parallel to one of said two spaced-apart axes.    
   
   
       2 . The method as recited in  claim 1  further includes positioning said body in a desired spatial relationship with respect to a reference surface, spaced-apart therefrom, by having said body undergo said translational motion.  
   
   
       3 . The method as recited in  claim 1  further includes positioning said body in a desired spatial relationship with respect to provide a layer of patterned material having a residual thickness associated therewith that is substantially uniform.  
   
   
       4 . The method as recited in  claim 1  wherein said two spaced-apart axes extend parallel to each other.  
   
   
       5 . The method as recited in  claim 1  wherein said two spaced-apart axes lie in differing planes.  
   
   
       6 . The method as recited in  claim 1  wherein said two spaced-apart axes extend transversely to each other.  
   
   
       7 . The method as recited in  claim 1  wherein imparting further includes coupling said body to an inner frame, with said inner frame being coupled to an outer frame to tilt about a plurality of transversely extending tilt axes one of which includes one of said two-spaced apart axes.  
   
   
       8 . The method as recited in  claim 1  wherein imparting further includes coupling said body to an inner frame, with said inner frame being coupled to an outer frame to vary translational motion along two or more plurality of translation axes located proximate to a periphery of said inner frame to tilt said inner frame and impart said angular motion about one of said two-spaced-apart axes.  
   
   
       9 . The method as recited in  claim 1  wherein imparting further includes coupling said body to a flexure coupled to an inner frame, with said flexure facilitating tilting of said body to impart said angular motion about one of said two-spaced apart axes.  
   
   
       10 . The method as recited in  claim 1  wherein imparting further includes coupling said body to a flexure coupled to an inner frame, with said flexure facilitating tilting of said body to impart said angular motion about one of said two-spaced apart and parallel axes, independent of the angular motion of the remaining one of said two-spaced apart and parallel axes.  
   
   
       11 . The method as recited in  claim 1  wherein imparting further includes coupling said body to an inner frame and a flexure with said inner frame coupled to impart tilting motion upon both said flexure and said substrate and said flexure being coupled to impart tilting motion upon said body independent of the tilting motion imparted by said inner frame.  
   
   
       12 . A method of controlling a spatial position of a substrate, said method comprising: 
 imparting a first angular motion of said substrate with respect to a first axis lying in a first plane; and    generating a second angular motion of said substrate with respect to a second axis lying in a second plane, spaced-apart from said first plane a first direction, with a combination of said first and second angular motions resulting in relative translational motion of said substrate along a movement plane extending transversely to said first direction.    
   
   
       13 . The method as recited in  claim 12  further includes positioning said substrate in a desired spatial relationship with respect to a reference surface, spaced-apart therefrom, by having said substrate undergo said translational motion.  
   
   
       14 . The method as recited in  claim 12  wherein said two spaced-apart axes extend parallel to each other.  
   
   
       15 . The method as recited in  claim 12  wherein said two spaced-apart axes extend transversely to each other.  
   
   
       16 . The method as recited in  claim 12  wherein imparting further includes coupling said substrate to a inner frame, with said inner frame being coupled to an outer frame to tilt about a plurality of transversely extending tilt axes to impart said first angular motion, one of which includes said first axis.  
   
   
       17 . The method as recited in  claim 12  wherein imparting further includes coupling said substrate to an inner frame, with said inner frame being coupled to an outer frame to vary translational motion along two or more plurality of translation axes located proximate to a periphery of said inner frame to tilt said inner frame and impart said first angular motion.  
   
   
       18 . The method as recited in  claim 12  wherein generating further includes coupling said substrate to a flexure coupled to an inner frame, with said flexure facilitating tilting of said substrate to impart said second angular motion.  
   
   
       19 . The method as recited in  claim 12  wherein generating further includes coupling said substrate to a flexure coupled to an inner frame, with said flexure facilitating tilting of said substrate to impart said second angular motion, independent of said first angular motion.  
   
   
       20 . The method as recited in  claim 12  wherein imparting further includes coupling said substrate to a inner frame and a flexure with said inner frame coupled to create tilting motion upon both said flexure and said substrate to impart said first angular motion and generating further includes said imparting tiling motion upon said substrate with said flexure to generate said second angular motion.  
   
   
       21 . A system to control movement of a body, said system comprising: 
 an actuation system coupled to said body to impart angular motion in said actuation system with respect to two spaced-apart axes to generate translational motion of said body in a translation plane extending parallel to one of said two spaced-apart axes.    
   
   
       22 . The system as recited in  claim 21  wherein said two spaced-apart axes extend parallel to each other.  
   
   
       23 . The system as recited in  claim 21  wherein said two spaced-apart axes lie in differing planes.  
   
   
       24 . The system as recited in  claim 21  wherein said two spaced-apart axes extend transversely to each other.  
   
   
       25 . The system as recited in  claim 21  wherein said actuation system further includes an inner frame and an outer frame, with said inner frame coupled to said outer frame to tilt about a plurality of transversely extending tilt axes one of which includes one of said two-spaced apart axes.  
   
   
       26 . The system as recited in  claim 21  wherein said actuation system further includes an inner frame and an outer frame, with said inner frame coupled to said outer frame to vary translational motion along two or more translation axes located proximate to a periphery of said inner frame and impart said angular motion about one of said two-spaced-apart axes.  
   
   
       27 . The system as recited in  claim 21  wherein said actuation system further includes an inner frame having a throughway, an outer frame having an aperture and a plurality of actuators coupled between said inner frame and said outer frame, with said aperture being in superimposition with said throughway and said plurality of actuators being disposed outside of said throughway.  
   
   
       28 . The system as recited in  claim 21  wherein said actuation system further includes an inner frame, an outer frame and a flexure, with said inner frame coupled between said outer frame and said flexure, with said flexure providing said angular motion about one of said two spaced-apart axes.  
   
   
       29 . The system as recited in  claim 21  wherein said actuation system further includes an inner frame, an outer frame and a flexure, with said inner frame coupled between said outer frame and said flexure, with said flexure providing said angular motion about one of said two-spaced apart axes, independent of the angular motion of the remaining one of said two-spaced apart and parallel axes.  
   
   
       30 . The system as recited in  claim 21  wherein said actuation system further includes an inner frame, an outer frame and a flexure, with said inner frame coupled between said outer frame and said flexure, with said inner frame coupled to said outer frame to vary translational motion along two or more translation axes located proximate to a periphery of said inner frame and impart said angular motion about one of said two-spaced-apart axes and said flexure providing said angular motion about the remaining axis of said two-spaced apart axes, with said angular motion about said remaining axis being independent of the angular motion of said one of said two spaced-apart axes.