Dust cleaner

Abstract

A dust cleaner applied to a process chamber having a heat plate comprises a dust-collecting cabin and at least a vacuum pipe. The dust-collecting cabin comprising at least one dust-collecting opening and one vent is disposed above the heat plate, and the vacuum pipe is connected with the vent. The suction force generated in the vacuum pipe can draw away the particles on the heat plate through the dust-collecting opening of the cabin and drain them out of the process chamber through the vent and the vacuum pipe.

1 . A dust cleaner for a process chamber including a heat plate, comprising: 
 a dust-collecting cabin, located above the heat plate, having at least    one dust-collecting opening and a vent; and    at least one vacuum pipe connected to the vent of the dust-collecting cabin.    
   
   
       2 . The dust cleaner of  claim 1 , wherein said dust-collecting opening is a slit.  
   
   
       3 . The dust cleaner of  claim 1 , wherein said dust-collecting cabin is a slab.  
   
   
       4 . The dust cleaner of  claim 1 , wherein said vacuum pipe is made of a flexible material.  
   
   
       5 . The dust cleaner of  claim 1 , wherein said dust-collecting cabin is made of a heat-resistant material.  
   
   
       6 . A process chamber, comprising: 
 a housing;    a heat plate, disposed on the bottom of the housing;    a dust-collecting cabin, located above the heat plate, including at least one dust-collecting opening and a vent; and    at least one vacuum pipe connected to the vent of the dust-collecting cabin.    
   
   
       7 . The process chamber according to  claim 6 , further including: 
 a guiding structure, having two slide slots for two opposing ends of the dust-collecting cabin to slide there along; and    a driver for driving the cabin to move along the slide slots.    
   
   
       8 . The process chamber according to  claim 6 , wherein said dust-collecting opening is a slit.  
   
   
       9 . The process chamber according to  claim 6 , wherein said dust-collecting cabin is a slab.  
   
   
       10 . The process chamber according to  claim 6 , wherein said vacuum pipe is made of a flexible material.  
   
   
       11 . The process chamber according to  claim 6 , wherein said dust-collecting cabin is made of a heat-resistant material.