Hot plate
Abstract
An object of the present invention is to provide a hot plate which is superior in thermal conductivity, is superior in temperature-rising/dropping property, particularly in temperature-dropping property, and has high cooling thermal efficiency at the time of cooling. The hot plate of the present invention is a hot plate comprising: a ceramic substrate; and a resistance heating element formed on the surface of said ceramic substrate or inside said ceramic substrate, wherein said ceramic substrate has a leakage quantity of 10 −7 Pa·m 3 /sec (He) or less by measurement with a helium leakage detector.
Claims
exact text as granted — not AI-modified1 . A hot plate comprising: a ceramic substrate; and a resistance heating element formed on the surface of said ceramic substrate or inside said ceramic substrates wherein said ceramic substrate has a leakage quantity of 10 −7 Pa·m 3 /sec (He) or less by measurement with a helium leakage detector.
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