Porous materials

Abstract

Porous thermoset dielectric materials having low dielectric constants useful in electronic component manufacture are provided along with methods of preparing the porous thermoset dielectric materials. Also provided are methods of forming integrated circuits containing such porous thermoset dielectric material.

1 - 15 . (canceled)  
   
   
       16 . A composition comprising B-staged thermoset dielectric matrix material and a plurality of cross-linked polymeric porogen particles; wherein the thermoset dielectric material is selected from the group consisting of benzocyclobutenes and polyarylenes; wherein the porogen particles are substantially compatible with the B-staged thermoset dielectric matrix material and wherein the porogen particles comprise as polymerized units one or more monomers selected from the group consisting of N-vinyl monomers and heteroatom-substituted styrene monomers and at least one (meth)acrylate cross-linking agent.  
   
   
       17 . The composition of  claim 16  wherein the (meth)acrylate cross-linking agent is selected from the group consisting of ethyleneglycol diacrylate, trimethylolpropane triacrylate, allyl methacrylate, ethyleneglycol dimethacrylate, diethyleneglycol dimethacrylate, propyleneglycol dimethacrylate, propyleneglycol diacrylate, trimethylolpropane trimethacrylate, glycidyl methacrylate, 2,2-dimethylpropane-1,3-diacrylate, 1,3-butylene glycol diacrylate, 1,3-butylene glycol dimethacrylate, 1,4-butanediol diacrylate, diethylene glycol diacrylate, diethylene glycol dimethacrylate, 1,6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, tripropylene glycol diacrylate, triethylene glycol dimethacrylate, tetraethylene glycol diacrylate, polyethylene glycol 200 diacrylate, tetraethylene glycol dimethacrylate, polyethylene glycol dimethacrylate, ethoxylated bisphenol A diacrylate, ethoxylated bisphenol A dimethacrylate, polyethylene glycol 600 dimethacrylate, poly(butanediol) diacrylate, pentaerythritol triacrylate, trimethylolpropane triethoxy triacrylate, glyceryl propoxy triacrylate, pentaerythritol tetraacrylate, pentaerythritol tetranethacrylate, dipentaerythritol monohydroxypentaacrylate, and mixtures thereof.  
   
   
       18 . The composition of  claim 16  wherein the N-vinyl monomers are selected from the group consisting of vinylpyridines, (C 1 -C 8 )alkyl substituted N-vinyl pyridines; N-vinylcaprolactam; N-vinylbutyrolactam; N-vinylpyrrolidone; vinyl imidazole; N-vinyl carbazole; N-vinyl-succinimide; N-vinyl-oxazolidone; N-vinylphthalimide; N-vinyl-pyrrolidones; vinyl pyrroles; vinyl anilines; and vinyl piperidines.  
   
   
       19 . The composition of  claim 16  wherein the N-vinyl monomers are selected from the group consisting of N-vinylpyrrolidone and N-vinylphthalimide.  
   
   
       20 . The composition of  claim 16  wherein the heteroatom-substituted styrene monomers are selected from the group consisting of vinylanisole, o-aminostyrene, m-aminostyrene, p-aminostyrene, 4-fluorostyrene, 3-fluorostyrene, and vinyldimethoxybenzene.