Apparatus and a method for forming an alloy layer over a substrate

Abstract

One embodiment of the invention involves introducing at least two metals into a chamber for forming an alloy layer over a substrate. This is accomplished by a variety of methods. In one embodiment, at least two metals are mixed and introduced into a chamber in which a focused ion beam contacts the two metals to form at least one alloy layer over a substrate. In another embodiment, at least two precursor gas sources are introduced into the chamber in which each precursor gas source contains a metal. The focused ion beam contacts the two precursor gases to form an alloy layer over the substrate. In yet another embodiment, a second metal layer is formed over a first metal layer to form a multi-metal layer. Thereafter, thermal treatment or introducing a focused ion beam to at least a portion of the multi-metal layer is performed to create at least one alloy layer over the substrate.

1 . A machine readable storage medium containing executable program instructions which when executed cause a system to perform a method comprising: 
 controlling introduction of at least two metal constituents into a chamber;    controlling a formation of an alloy from the at least two metal constituents by controlling one of: 
 (1) introducing the at least two metal constituents into a chamber in which a focused ion beam contacts the two metal constituents to form a first alloy layer over a substrate;  
 (2) introducing at about the same time at least two precursor gas sources in which each precursor gas source contains a respective one of the at least two metal constituents and the focused ion beam contacts the at least two precursor gases to form a first alloy layer over the substrate, and  
 (3) forming a first layer of a first of the at least two metal constituents and a second layer of a second of the at least two metal constituents a multi-metal layer and performing one of thermal treatment and introducing focused ion beam to at least a portion of the multi-metal layer to form a first alloy layer over a substrate.  
   
   
   
       2 . The machine readable storage medium of  claim 6 , the method further comprises: 
 forming more than one alloy layer, wherein a second alloy layer is formed over the first alloy layer.    
   
   
       3 . The machine readable storage medium of  claim 6 , wherein the method further comprises: 
 controlling a formation of a second alloy layer over the substrate.    
   
   
       4 . The machine readable storage medium of  claim 6 , wherein each of the at least two metal constituents is selected from the group consisting of cobalt, metal carbonyl, molybdenum, and tungsten.  
   
   
       5 . The method of claim  8 , wherein the method further comprises: 
 an alloy process to the second alloy layer.    
   
   
       6 . The machine readable storage medium of claim  10 , wherein the alloy process is one of thermal treatment and applying a focused io