Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas

Abstract

Apparatus and process for the abatement of fluorine and fluorine-containing compounds from gases containing same, such as effluent gas streams from semiconductor manufacturing operations, wherein a fluorocompound abatement medium is injected into the fluorocompound-containing gas. The fluorocompound abatement medium comprises at least one of steam, methane and hydrogen, with the proviso that when the fluorocompound abatement medium contains methane and/or hydrogen, the injection of the fluorocompound abatement medium is conducted under non-combustion conditions.

1 . A steam injection fluorocompound abatement apparatus comprising: 
 an elongate flow passage member adapted for introduction of fluorocompound-containing gas thereto at a first end thereof for flow through the flow passage member to a second discharge end thereof;    a heat source for heating the fluorocompound-containing gas during flow through the elongate flow passage member to a reaction zone at an intermediate portion of the elongate flow passage member between its first and second ends; and    a steam source arranged to inject steam into the reaction zone of the elongate flow passage member.    
   
   
       2 . An apparatus according to  claim 1 , further comprising a cooler operatively thermally coupled to the elongate flow passage member between the reaction zone and the second end of the elongate flow passage member.  
   
   
       3 . An apparatus according to  claim 1 , wherein the heat source comprises a cartridge heater.  
   
   
       4 . An apparatus according to  claim 1 , wherein the elongate flow passage member is constructed as a throughbore passage in a block member.  
   
   
       5 . An apparatus according to  claim 4 , wherein the block member further comprises a water flow steam generation passage therein, wherein said water flow steam generation passage terminates at a steam entrance communicating with the throughbore passage at the reaction zone.  
   
   
       6 . An apparatus according to  claim 4 , wherein the block member further comprises a cartridge heater passage therein, and a cartridge heater installed in the cartridge heater passage.  
   
   
       7 . An apparatus according to  claim 4 , wherein the block member further comprises a water flow steam generation passage therein, wherein said water flow steam generation passage terminates at a steam entrance communicating with the throughbore passage at the reaction zone, and wherein the block member further comprises a cartridge heater passage therein, and a cartridge heater installed in the cartridge heater passage.  
   
   
       8 . An apparatus according to  claim 4 , wherein the block member comprises two matably engageable half-sections.