Method and apparatus for providing and electrochemical gas sensor having a porous electrolyte

Abstract

The invention relates to an electrochemical gas sensor having improved response time and sensitivity. The electrochemical gas sensor includes a substrate for providing a surface upon which an electrode may be placed, a first electrode placed on the surface, a thin film of electrolyte support for receiving electrolyte and having a predetermined porosity, and a second electrode deposited on the thin film for permitting a measurement of current between the first and second electrodes.

1 - 14 . (canceled)  
   
   
       15 . A method for providing an electrochemical gas sensor, comprising: 
 providing a substrate;    depositing a first electrode on said substrate;    depositing an electrolyte support on said first electrode and said substrate for forming a plurality of columns;    capping said electrolyte support; and    depositing a second electrode on said capped electrolyte support.    
   
   
       16 . The method according to  claim 15 , further comprising the step of introducing a solution into said electrolyte support for providing an electrolytic film.  
   
   
       17 . The method according to  claim 15 , further comprising the step of sputter and vapor deposition coating said first electrode.  
   
   
       18 . The method according to  claim 15 , further comprising the step of sputter and vapor deposition coating said second electrode.  
   
   
       19 . The method according to  claim 15 , further comprising the step of capping said electrolyte support between 0 and 60 degrees from a substrate normal.  
   
   
       20 . The method according to  claim 15 , further comprising the step of improving lamination to said electrolyte support by depositing said second electrode.  
   
   
       21 . A method for providing an electrochemical sensor, comprising: 
 providing a substrate;    directing a vapor for an electrolyte support towards said substrate in a generally angular direction for forming a plurality of columns; and    rotating the substrate about an axis generally parallel to a plane of the substrate for capping the plurality of columns.    
   
   
       22 . The method according to  claim 21 , further comprising the step of rotating the substrate about an axis generally perpendicular to the plane of the substrate for forming helically shaped columns.  
   
   
       23 . The method according to  claim 21 , wherein the substrate is rotated between 0 and 60 degrees from a substrate normal.  
   
   
       24 . An electrochemical gas sensor, comprising: 
 a substrate having a surface;    a first electrode deposited on said surface;    a second electrode spaced apart from said surface; and    an electrolyte support placed between said surface and having a pore size between 0.0002 and 10 microns.