Method for manufacturing a cell driving type actuator

Abstract

A method for manufacturing, by utilizing a punch and a die, a cell driving type actuator wherein a plurality of piezoelectric/electrostrictive elements are arranged in alignment like the teeth of a comb on a base plate. Each cell is formed by closing two adjacent piezoelectric/electrostrictive elements disposed on the base plate with a cover plate positioned at a plane facing the base plate in such a manner that the cell is formed independently from its adjacent cells. The method includes the steps of preparing a plurality of green sheets made of piezoelectric/electrostrictive material, machining slit apertures in all of the green sheets with the punch, and laminating all of the green sheets after positioning them, thus forming comb-like piezoelectric/electrostrictive elements.

1 . A method for manufacturing, by utilizing a punch and a die, a cell driving type actuator wherein a plurality of piezoelectric/electrostrictive elements are arranged in alignment like the teeth of a comb on a base plate; each cell being formed by closing two adjacent piezoelectric/electrostrictive elements disposed on the base plate with a cover plate positioned at a plane facing the base plate in such a manner that said cell is formed independently from its adjacent cells, wherein said method comprises the steps of: 
 preparing a plurality of green sheets made of piezoelectric/electrostrictive material;    machining slit apertures in all of said green sheets with said punch; and    laminating all the green sheets after positioning them, thus forming comb-like piezoelectric/electrostrictive elements.    
   
   
       2 . A method for manufacturing, by utilizing a punch and a die, a cell driving type actuator wherein a plurality of piezoelectric/electrostrictive elements are arranged in alignment like the teeth of a comb on a base plate; each cell being formed by closing two adjacent piezoelectric/electrostrictive elements disposed on the base plate with a cover plate positioned at a plane facing the base plate in such a manner that said cell is formed independently from its adjacent cells, wherein said method comprises: 
 a step of preparing a plurality of green sheets made of piezoelectric/electrostrictive material,    a first step of machining first slit apertures in a first green sheet with the punch,    a second step of moving the first green sheet upwards into tight contact with a stripper in the state of not withdrawing the punch from the first slit apertures,    a third step of moving the punch upwards in such a way that the front end of the punch is withdrawn slightly from the lowest part of the first green sheet which was moved upwards,    a fourth step of machining second slit apertures in a second green sheet with the punch,    a fifth step of moving the second green sheet upwards, together with the first green sheet in the state of not withdrawing the punch from the second slit apertures, and    a sixth step of moving the punch upwards in such a way that the front end of the punch is withdrawn slightly from the lowest part of the second green sheet which was moved upwards, and thereafter,    laminating a plurality of green sheets by repeating the fourth to sixth steps so as to form a comb-like piezoelectric/electrostrictive elements.