UV-stable grease or seal substance for optical systems, manufacture thereof as well as use thereof

Abstract

A UV-stable lubricating and/or sealing compound, and method for production thereof. The compound includes a base oil and a powder-form inorganic thickener distributed homogeneously therein. At room temperature, the base oil has a vapor pressure of <10 −10 mbar, the thickener includes at least one inorganic dry lubricant and/or ceramic filler with a maximum mean particle size of 10 μm.

1 . A compound, comprising a base oil and a powder-form inorganic thickener distributed homogeneously therein the base oil having at room temperature a vapor pressure of <10 −10  mbar and the thickener comprising at least one of the group consisting of an inorganic dry lubricant and a ceramic filler with a mean particle size of a maximum of 10 μm.  
   
   
       2 . The compound according to  claim 1 , wherein said compound is a UV-stable lubricating and/or sealing compound, in particular for clean room applications, for high vacuum and/or optical components.  
   
   
       3 . The compound according to  claim 1 , the base oil comprising at least one of the group consisting of synthetic liquid perfluoro polyethers and polyphenyl ethers, which are suitable for high vacuum.  
   
   
       4 . The compound according to  claim 1 , the inorganic dry lubricant comprising at least one of the group consisting of hexagonal boron nitride, graphite, MoS 2 , WS 2 , NbS 2 , TaS 2 , AsSbS 4 , AsAsS 4 , WSe 2 , NbSe 2 , and TaSe 2 .  
   
   
       5 . The compound according to  claim 1 , further comprising a ceramic filler that is resistant to radiation.  
   
   
       6 . The compound according to  claim 5 , wherein the filler is a metal oxide.  
   
   
       7 . The compound according  claim 1 , wherein the filler comprises at least one of the group consisting of ZrO 2 , Ta 2 O 5 , HfO 2 , TiO 2 , SnO 2 , Nb 2 O 5 , SiO 2 , Al 2 O 3 , ceramic mixed oxide systems, and highly dispersed silicon dioxide.  
   
   
       8 . The compound according  claim 1 , having a vapor pressure of <10 −12  mbar.  
   
   
       9 . The compound according to  claim 1 , wherein the dry lubricants and/or fillers that are used have a mean particle size diameter of <100 nm.  
   
   
       10 . A method for the production of a UV-stable sealing compound according to  claim 1  comprising the steps of: removing volatile components with a vapor pressure of >10 −10  mbar from the base oil in high vacuum, dispersing the thickener, yielding a crude paste in the base oil and applying a shearing force to the crude paste in order to pulverize agglomerates of powder particles.  
   
   
       11 . (canceled)  
   
   
       12 . A method for the production of an optical device with components, comprising the step of sealing a space between the components.  
   
   
       13 . The method according to  claim 12 , wherein said optical device is a lithography objective.  
   
   
       14 . The method according to  claim 12 , wherein said optical device is a laser.  
   
   
       15 . A compound comprising at least one of the group consisting of synthetic liquid perfluoro polyethers and polyphenyl ethers, and further comprising at least one the group consisting of hexagonal boron nitride, graphite, MoS 2 , WS 2 , NbS 2 , TaS 2 , AsSbS 4 , As 2 S 4 , WSe 2 , NbSe 2 , TaSe 2 , ZrO 2 , Ta 2 O 5 , HfO 2 , TiO 2 , SnO 2 , Nb 2 O 5 , SiO 2 , Al 2 O 3 , ceramic mixed oxide systems, and highly dispersed silicon dioxide.