Method and device for in situ layer thickness determination

Abstract

A method and device for layer thickness determination allows for the layer thickness to be determined in situ during the coating process. This is achieved using a sensor which has an electrical property which, as a result of the coating process, changes in a manner which is representative of the layer thickness which has been reached. As such, this property can be measured.

1 . A device for in situ layer thickness determination during a coating process, comprising: 
 a sensor, adapted to be changed by the coating process in such a way that, as a result, an electrical property of the sensor which bears a correlation to the layer thickness is influenced; and    means for measuring the change in the electrical property to determine the layer thickness.    
   
   
       2 . The device as claimed in  claim 1 , wherein the sensor consists of MCrAlY, where M is an element selected from the group consisting of iron, cobalt and nickel.  
   
   
       3 . The device as claimed in  claim 1 , wherein the coating process is an alitizing process.  
   
   
       4 . The device as claimed in  claim 1 , wherein the electrical property is the electrical resistance.  
   
   
       5 . The device as claimed in  claim 1 , wherein the sensor is a sintered part.  
   
   
       6 . The device as claimed in  claim 1 , wherein the coating process is a chemical vapor deposition process.  
   
   
       7 . The device as claimed in  claim 1 , wherein the coating process is used for the internal coating of a component.