Volatile copper(I) complexes for deposition of copper films by atomic layer deposition

Abstract

The present invention relates to novel 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an Atomic Layer Deposition process.

1 . A process for forming copper deposits on a substrate comprising: 
 a. contacting a substrate with a copper complex, (I), to form a deposit of a copper complex on the substrate; and                          b. contacting the deposited copper complex with a reducing agent, wherein    L is selected from the group of C 2 -C 15  olefins, C 2 -C 15  alkynes, nitriles, aromatic heterocycles, and phosphines;    R 1  and R 4  are independently selected from the group consisting of hydrogen, methyl, ethyl, propyl, isopropyl, isobutyl, and neopentyl;    R 2 , R 3  and R 5  are independently selected from the group consisting of hydrogen, fluorine, trifluoromethyl, phenyl and C 1 -C 10  alkyl groups; and    the reducing agent is selected from the group consisting of 9-BBN (9-borabicyclo[3.3.1]nonane); diborane; boranes of the form BR x H 3-x , where x=0, 1 or 2, and R is independently selected from the group consisting of phenyl and C 1 -C 10  alkyl groups; dihydrobenzofuran; pyrazoline; disilane;    silanes of the form SiR′ y H 4-y , where y=0, 1, 2 or 3, and R′ is independently selected from the group consisting of phenyl and C 1 -C 10  alkyl groups; and germanes of the form GeR″ z H 4-z , where z=0, 1, 2, or 3, and R″ is independently selected from the group consisting of phenyl and C 1 -C 10  alkyl groups.    
     
     
         2 . The process of  claim 1 , wherein R 5  is hydrogen.  
     
     
         3 . The process of  claim 2 , wherein R 2  and R 3  are methyl and R 1  and R 4  are independently isobutyl or hydrogen.  
     
     
         4 . The process of  claim 1 , wherein L is vinyltrimethylsilane.  
     
     
         5 . The process of  claim 1 , wherein the substrate is selected from the group consisting of copper, silicon wafers and silicon dioxide coated with a barrier layer.  
     
     
         6 . The process of  claim 1 , wherein the substrate is exposed to a vapor of the copper complex.  
     
     
         7 . The process of  claim 1 , wherein the deposition is carried out at 0 to 200° C.  
     
     
         8 . The process of  claim 1 , wherein the reducing agent is silane or diethylsilane.  
     
     
         9 . A copper complex, (I),  
       
         
           
           
               
               
           
         
       
       wherein 
 L is selected from the group of C 2 -C 15  olefins, C 2 -C 15  alkynes, nitriles, aromatic heterocycles, and phosphines;  
 R 1  and R 4  are independently selected from the group consisting of hydrogen, methyl, ethyl, propyl, isopropyl, isobutyl, and neopentyl;  
 R 2 , R 3  and R 5  are independently selected from the group consisting of hydrogen, fluorine, trifluoromethyl, phenyl and C 1 -C 10  alkyl groups.  
 
     
     
         10 . The copper complex (I) of  claim 9 , wherein 
 L is vinyltrimethylsilane; R 1  and R 4  are iso-butyl; and R 2 , R 3  are methyl and R 5  is H.    
     
     
         11 . The copper complex (I) of  claim 9 , wherein 
 L is vinyltrimethylsilane; R 1  and R 4  are H; and R 2 , R 3  are methyl and R 5  is H.    
     
     
         12 . An article produced by contacting a substrate with a copper complex of  claim 9 .  
     
     
         13 . The article of  claim 12 , wherein the substrate is selected from the group of copper, silicon wafers, and silicon dioxide coated with a barrier layer.  
     
     
         14 . The article of  claim 13 , wherein the barrier layer is selected from the group consisting of tantalum, tantalum nitride, titanium, titanium nitride, tantalum silicon nitride, titanium silicon nitride, tantalum carbon nitride, and niobium nitride.