Method of manufacturing electroluminescent display device

Abstract

An electroluminescent display device includes a transparent substrate and an electroluminescent element disposed over the substrate. The electroluminescent element has a first electrode disposed over the substrate, a second electrode disposed over the first electrode and a light emitting layer disposed between the first and second electrodes. The display device also includes a thin film transistor driving the electroluminescent element, and a protection film disposed over the second electrode and being configured to prevent a penetration of moisture into the electroluminescent element. The second electrode is formed by evaporating aluminum so that the light emitting layer receives no damage, and the protection film is deposited by sputtering to provide a film with a high relative density so that moisture is prevented from entering the electroluminescent element.

1 - 13 . (canceled)  
   
   
       14 . A manufacturing method of an electroluminescent display device, comprising: 
 providing a substrate;    forming a first electrode over the substrate;    forming a light emitting layer over the first electrode;    forming a second electrode over the light emission layer; and    depositing a protection film over the second electrode so that the protection film is not permeable to moisture.    
   
   
       15 . The manufacturing method of an electroluminescent display device of  claim 14 , wherein the forming of the second electrode and the depositing of the protection film are performed consecutively without breaking vacuum.  
   
   
       16 . The manufacturing method of an electroluminescent display device of  claim 14 , wherein the forming of the light emitting layer, the forming of the second electrode and the depositing of the protection film are performed consecutively without breaking vacuum.  
   
   
       17 . The manufacturing method of an electroluminescent display device of  claim 14 , wherein the forming of the second electrode comprises depositing the second electrode by evaporation.  
   
   
       18 . The manufacturing method of an electroluminescent display device of  claim 14 , wherein the depositing of the protection film is performed by sputtering.  
   
   
       19 . A manufacturing method of an electroluminescent display device, comprising: 
 providing a substrate;    forming a first electrode over the substrate;    forming a light emitting layer over the first electrode;    forming a second electrode over the light emission layer; and    depositing a metal on the second electrode to form a protection film so that a relative density of the protection film is higher than a relative density of the second electrode.    
   
   
       20 . The manufacturing method of an electroluminescent display device of  claim 19 , wherein the forming of the second electrode and the depositing of the metal of the protection film are performed consecutively without breaking vacuum.  
   
   
       21 . The manufacturing method of an electroluminescent display device of  claim 19 , wherein the forming of the light emitting layer, the forming of the second electrode and the depositing of the metal of the protection film are performed consecutively without breaking vacuum.  
   
   
       22 . The manufacturing method of an electroluminescent display device of  claim 19 , wherein the forming of the second electrode comprises depositing the second electrode by evaporation.  
   
   
       23 . The manufacturing method of an electroluminescent display device of  claim 19 , wherein the depositing of the metal of the protection film is performed by sputtering.  
   
   
       24 . The manufacturing method of an electroluminescent display device of  claim 19 , wherein the metal of the protection film has a melting point higher than 1085° C.  
   
   
       25 - 27 . (canceled)  
   
   
       28 . The manufacturing method of an electroluminescent display device of  claim 17 , wherein the depositing of the protection film is performed by sputtering.  
   
   
       29 . The manufacturing method of an electroluminescent display device of  claim 22 , wherein the depositing of the metal of the protection film is performed by sputtering.