Support jig of quartz glass for receiving wafer-like substrates of semiconductor material

Abstract

A support jig of quartz glass for receiving wafer-like substrates of semiconductor material in a vertical orientation comprises two spaced-apart circular end plates ( 10 ) which are interconnected by means of at least three transverse rods ( 1, 2, 3 ) extending in parallel with one another and between the end plates. They are provided with slots ( 4 ) for receiving the substrates, the slots ( 4 ) being open towards the substrate to be received and having a predetermined maximum slot depth, and they are arranged in a partial circle around the circular edge ( 5 ) of the end plates ( 10 ) such that an envelope ( 6 ) which encloses the partial circle on the outside projects nowhere beyond the circular edge ( 5 ). At least part of the transverse rods ( 1, 2, 3 ) have a radial cross-sectional profile which is configured as a circular form with a flattening ( 21, 31 ). The transverse rods ( 1, 2, 3 ) are arranged around the partial circle such that the flattening ( 21, 31 ) is oriented towards the circular edge of the end plates.

1 . A support jig of quartz glass for receiving wafer-like substrates of semiconductor material in a vertical orientation, comprising two spaced-apart circular end plates ( 10 ) which are interconnected by means of at least three transverse rods ( 1 ,  2 ,  3 ) extending in parallel with one another and between the end plates, 
 which are provided with slots ( 4 ) for receiving the substrates, the slots ( 4 ) being open towards the substrate to be received and having a predetermined maximum slot depth, and    which are arranged in a partial circle around the circular edge ( 5 ) of the end plates ( 10 ) such that an envelope ( 6 ) which encloses the partial circle on the outside projects nowhere beyond the circular edge ( 5 ),    characterized in    that at least part of the transverse rods ( 1 ,  2 ,  3 ) have a radial cross-sectional profile which is configured as a circular form with a flattening ( 21 ,  31 ),    and that the transverse rods ( 1 ,  2 ,  3 ) are arranged around the partial circle such that the flattening ( 21 ,  31 ) is oriented towards the circular edge of the end plates.    
   
   
       2 . The support jig according to  claim 1 , characterized in that the flattening ( 21 ,  31 ) contacts the circular edge ( 5 ) of the end plates.  
   
   
       3 . The support jig according to  claim 1  or  claim 2 , characterized in that the flattening ( 21 ,  31 ) is configured as a planar surface.  
   
   
       4 . The support jig according to  claim 1  or  claim 2 , characterized in that the flattening is configured as a curved surface.  
   
   
       5 . The support jig according to any one of the preceding claims, characterized in that the tangent to the flattening ( 21 ) at the point of contact extends in at least one of the transverse rods ( 2 ) in parallel with the slot bottom and in at least one further transverse rod ( 1 ,  3 ) at an oblique angle relative to the slot bottom.  
   
   
       6 . The support jig according to any one of the preceding claims, characterized in that the transverse rods ( 1 ,  2 ,  3 ) have a maximum outer diameter of more than 22 mm, preferably 25 mm or more.  
   
   
       7 . The support jig according to any one of the preceding claims, characterized in that the transverse rods ( 1 ,  2 ,  3 ) have a maximum outer diameter of 30 mm or less.  
   
   
       8 . The support jig according to any one of the preceding claims, characterized in that at least part of the transverse rods have a radial cross-sectional profile in which a second flattening is provided in the area of the slots.  
   
   
       9 . The support jig according to any one of the preceding claims, characterized in that the flattening ( 21 ,  31 ) and/or the slots ( 4 ) have surfaces that are fire polished.  
   
   
       10 . The support jig according to  claim 9 , characterized in that the fire polish is produced by using a robot.  
   
   
       11 . The support jig according to any one of the preceding claims, characterized in that the slots ( 4 ) are produced in a machine-controlled manner.