US2005221729A1PendingUtilityA1

Method of repairing a pedestal surface

26
Individually held — no corporate assignee on recordPriority: Mar 19, 2003Filed: Mar 16, 2004Published: Oct 6, 2005
Est. expiryMar 19, 2023(expired)· nominal 20-yr term from priority
Inventors:Chin Wen Lee
C23C 16/4581
26
PatentIndex Score
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Claims

Abstract

A method of repairing a pedestal heater uses a diamond film stuck onto a silicon wafer to polish the surface of the heater and so remove distortion, coating or surface scratches.

Claims

exact text as granted — not AI-modified
1 . A method of repairing a pedestal surface, comprising the step of polishing said surface using a coarse surface of a film.  
   
   
       2 . A method according to  claim 1 , wherein the film has a coarseness of from 1 to 45 microns.  
   
   
       3 . A method of repairing a pedestal surface, comprising the step of polishing said surface using a coarse surface with a coarseness of from 1 to 45 microns.  
   
   
       4 . A method according to  claim 3 , wherein the coarse surface is a coarse surface of a film.  
   
   
       5 . A method according to  claim 1 , wherein the film is mounted on one side of a silicon wafer.  
   
   
       6 . A method according to  claim 5 , wherein the film is mounted on the silicon wafer using a mineral oil as an adhesive.  
   
   
       7 . A method according to  claim 6 , wherein the mineral oil is a fluorinated oil  
   
   
       8 . A method according to  claim 5 , wherein the other side of the silicon wafer from the coarse surface has tape thereon to provide an improved grip.  
   
   
       9 . A method according to  claim 1 , further comprising the step of applying IPA between the coarse surface and the pedestal surface prior to polishing.  
   
   
       10 . A method according to  claim 1 , wherein the coarse surface comprises diamond grains.  
   
   
       11 . A method according to  claim 1 , wherein the pedestal is a heater pedestal.  
   
   
       12 . A method according to  claim 1 , wherein the pedestal is a pedestal for use in CVD, PVD, metal/oxide etching, photolithographic scanning or semiconductor processing that requires heating or a vacuum or mechanical devices to secure the position of a wafer to the pedestal surface.  
   
   
       13 . A pedestal repaired according to  claim 1 .  
   
   
       14 . A pedestal repair apparatus comprising a silicon wafer, with a coarse film on one side thereof.

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