Teaching method and processing system

Abstract

A teaching method for storing in a controller a target moving position of a transfer mechanism in a processing system includes the steps of temporarily stopping the transfer mechanism in the middle of a moving route to a temporary moving destination position so as to make sure that the transfer mechanism does not interfere with another members at a potential interference location where there is a possibility that the transfer mechanism interferes with said another member, resuming to move the temporarily stopped transfer mechanism by inputting a moving instruction, repeating the temporarily stopping step and the resuming step, and when the pick reaches the temporary moving destination position, storing, as the target moving position, in the controller a position of the pick after adjusting and moving or without adjusting and moving the position of the pick.

1 . A teaching method for storing in a controller a target moving position of a transfer mechanism in a processing system provided with the transfer mechanism for transferring an object to be processed by supporting same with a pick, the teaching method comprising the steps of: 
 temporarily stopping the transfer mechanism in the middle of a moving route to a temporary moving destination position so as to make sure that the transfer mechanism does not interfere with another members at a potential interference location where there is a possibility that the transfer mechanism interferes with said another member;    resuming to move the temporarily stopped transfer mechanism by inputting a moving instruction;    repeating the temporarily stopping step and the resuming step; and    when the pick reaches the temporary moving destination position, storing, as the target moving position, in the controller a position of the pick after adjusting and moving or without adjusting and moving the position of the pick.    
   
   
       2 . The teaching method of  claim 1 , wherein the transfer mechanism is adjusted and moved to a location where there is no possibility of interference with another member in case there is a possibility that the temporarily stopped transfer mechanism interferes with said another member.  
   
   
       3 . The teaching method of  claim 1 , wherein the potential interference location is calculated and obtained in advance by the controller based on design values of the processing system.  
   
   
       4 . The teaching method of  claim 1 , wherein the controller displays on a display unit a message for informing an operator of a potential interference whenever the transfer mechanism is temporarily stopped.  
   
   
       5 . The teaching method of  claim 1 , wherein an arm of the transfer mechanism is a stretchable, bendable and revolvable multi-joint arm.  
   
   
       6 . The teaching method of  claim 1 , wherein the target moving position is a position in an inlet port for loading the object to be processed into the processing system.  
   
   
       7 . The teaching method of  claim 2 , wherein the potential interference location is calculated and obtained in advance by the controller based on design values of the processing system.  
   
   
       8 . The teaching method of  claim 2 , wherein the controller displays on a display unit a message for informing an operator of a potential interference whenever the transfer mechanism is temporarily stopped.  
   
   
       9 . The teaching method of  claim 2 , wherein an arm of the transfer mechanism is a stretchable, bendable and revolvable multi-joint arm.  
   
   
       10 . The teaching method of  claim 2 , wherein the target moving position is a position in an inlet port for loading the object to be processed into the processing system.  
   
   
       11 . A processing system comprising 
 a processing chamber for performing a processing on an object to be processed;    an inlet port for introducing the object to be processed;    an orienter for performing a position aligning of the object to be processed;    a transfer mechanism, having a pick for supporting the object to be processed, for transferring the object to be processed; and    a controller for controlling an operation of the transfer mechanism,    wherein the controller is configured to perform the steps of:    temporarily stopping the transfer mechanism in the middle of a moving route to a temporary moving destination position so as to make sure that the transfer mechanism does not interfere with another member at a potential interference location where there is a possibility that the transfer mechanism interferes with said another member;    resuming to move the temporarily stopped transfer mechanism by inputting a moving instruction;    repeating the temporarily stopping step and the resuming step; and    when the pick reaches the temporary moving destination position, storing, as the target moving position, in the controller a position of the pick after adjusting and moving or without adjusting and moving the position of the pick.    
   
   
       12 . The processing system of  claim 11 , wherein the controller calculates and obtains in advance the potential interference location based on design values of the processing system.  
   
   
       13 . The processing system of  claim 11 , wherein the controller is connected to a display unit and displays on the display unit a message for informing an operator of a potential interference whenever the transfer mechanism temporarily is stopped.  
   
   
       14 . The processing system of  claim 12 , wherein the controller is connected to a display unit and displays on the display unit a message for informing an operator of a potential interference whenever the transfer mechanism temporarily is stopped.