Reflective liquid crystal display device

Abstract

The present invention provides a method of manufacturing an active matrix reflecting liquid crystal display device including the step of forming and processing an interlayer insulating film. The step forming and processing an interlayer insulating film includes step A of forming the interlayer insulating film on a silicon film in which the sources and drains of TFTs are formed; step B of forming a photoresist layer on the interlayer insulating film; step C of patterning the photoresist layer in a specified pattern by using, as a photoresist mask for the photoresist layer, a mask having a pattern formed with a resolution limit or less corresponding to the reflecting electrode to be formed; and step D of etching the interlayer insulating film by using the photoresist layer patterned in step C as an etching mask. After step D, a metal film is deposited for simultaneously forming source electrodes, signal wiring, drain electrodes, and the reflecting electrode. The manufacturing method can thus be simplified to improve productivity.

1 - 8 . (canceled)  
   
   
       9 . An active matrix reflective liquid crystal display device comprising an insulating film formed on a silicon film in which sources and drains of TFTs are formed, and a reflecting electrode having an irregular surface and formed on the insulating film, wherein the insulating layer comprises a single insulating film.  
   
   
       10 . A liquid crystal display device according to  claim 9 , further comprising a transparent conductive film formed on the reflecting electrode so that the transparent conductive film is connected to the reflecting electrode.  
   
   
       11 . A liquid crystal display device according to  claim 10 , further comprising a protecting film provided between the reflecting electrode and the transparent conductive film so that the cell gap of a liquid crystal display cell is set to ¼λ.  
   
   
       12 . A liquid crystal display device according to  claim 11 , wherein the surface irregularity is formed in the transparent conductive film formed on the reflecting electrode.  
   
   
       13 . A liquid crystal display device according to  claim 9 , wherein the reflecting electrode is deposited on the insulating layer through the transparent conductive film.