Industrial machine management system, and method

Abstract

A system for quickly and easily optimizing the parameters of an industrial machine or solving any trouble in industrial machine is provided. A factory ( 100 ) and vendor ( 200 ) are connected through a data communication network ( 300 ). A management apparatus ( 120 ) selectively gives the operation right of an industrial machine ( 110 ) to a factory-side operation apparatus ( 130 ) or a vendor-side operation apparatus ( 210 ) arranged at a remote site. The operation apparatus having the given operation right can operate the industrial machine ( 110 ) and obtain information representing the operation condition of the industrial machine.

1 . A management system for managing an, industrial machine using a data communication network, comprising: 
 a management apparatus for selectively giving an operation right of the industrial machine to one of a first operation apparatus arranged in a factory where the industrial machine is installed and a second operation apparatus arranged at a remote site from the factory where the industrial machine is installed; and    a control apparatus for operating the industrial machine in accordance with an instruction from the operation apparatus to which the operation right has been given by said management apparatus and providing information representing an operation condition of the industrial machine to the operation apparatus.    
   
   
       2 . The system according to  claim 1 , wherein the second operation apparatus and said control apparatus are connected through the data communication network.  
   
   
       3 . The system according to  claim 1 , wherein said management apparatus selectively gives the operation right of the industrial machine to one of the first and second operation apparatuses in accordance with an instruction from a manager of the industrial machine.  
   
   
       4 . The system according to  claim 3 , wherein the system further comprises a manager setting section for setting the manager of the industrial machine, and 
 said management apparatus selectively gives the operation right of the industrial machine to one of the first and second operation apparatuses in accordance with an instruction from the manager set by said manager setting section.    
   
   
       5 - 9 . (canceled)  
   
   
       10 . The system according to  claim 1 , wherein the second operation apparatus is arranged in a business office of a person in charge of manufacturing, sales, or maintenance of the industrial machine or a person in charge of services about the industrial machine.  
   
   
       11 . The system according to  claim 1 , wherein the industrial machine comprises a semiconductor manufacturing apparatus.  
   
   
       12 . The system according to  claim 11 , wherein said semiconductor manufacturing apparatus comprises anyone of an exposure apparatus, CVD apparatus, etching apparatus, CMP apparatus, resist coating apparatus, development apparatus, ashing apparatus, and inspection apparatus.  
   
   
       13 . A management method of managing an industrial machine using a data communication network, comprising: 
 the management step of selectively giving an operation right of the industrial machine to one of a first operation apparatus arranged in a factory where the industrial machine is installed and a second operation apparatus arranged at a remote site from the factory where the industrial machine is installed; and    the control step of sending an instruction from the operation apparatus to which the operation right has been given in the management step to a control apparatus of the industrial machine to cause the control apparatus to control the industrial machine and sending information representing an operation condition of the industrial machine from the control apparatus to the operation apparatus.    
   
   
       14 . The method according to  claim 13 , wherein the second operation apparatus and control apparatus are connected through the data communication network.  
   
   
       15 . The method according to  claim 13 , wherein in the management step, the operation right of the industrial machine is selectively given to one of the first and second operation apparatuses in accordance with an instruction from a manager of the industrial machine.  
   
   
       16 . The method according to  claim 15 , wherein 
 the method further comprises the setting step of setting the manager of the industrial machine, and    in the management step, the operation right of the industrial machine is selectively given to one of the first and second operation apparatuses in accordance with an instruction from the manager set in the setting step.    
   
   
       17 - 21 . (canceled)  
   
   
       22 . The method according to  claim 13 , wherein the second operation apparatus is arranged in a business office of a person in charge of manufacturing, sales, or maintenance of the industrial machine or a person in charge of services about the industrial machine.  
   
   
       23 . The method according to  claim 13 , wherein the industrial machine comprises a semiconductor manufacturing apparatus.  
   
   
       24 . The method according to  claim 23 , wherein the semiconductor manufacturing apparatus comprises anyone of an exposure apparatus, CVD apparatus, etching apparatus, CMP apparatus, resist coating apparatus, development apparatus, ashing apparatus, and inspection apparatus.