Device and method for manufacturing carbon nanotube

Abstract

There is provided a device for manufacturing carbon nanotube. The devices has a chamber support part for supporting a chamber which contains a plurality of microstructures, each of which is separated from each other by an interval; a gas providing part, connected to the chamber, for flowing at least one reactant gas, including raw material gas for manufacturing carbon nanotubes, through the chamber; a measurement part for measuring a change in physical properties of at least one of the plurality of microstructures by using detecting part; and a control part for controlling the gas providing part based on the measured change in physical properties.

1 . A method for manufacturing carbon nanotube, the method comprising the steps of: 
 flowing at least one reactant gas through at least one reaction region including a plurality of microstructures, each of which is separated from each other by an interval, and to generate and grow at least one carbon nanotube such that a bridge is made between the microstructures;    measuring a change in physical properties of at least one of the plurality of microstructures by using detecting means; and    controlling the generation and growth of at least one carbon nanotube based on the measured change in physical properties.    
     
     
         2 . The method according to  claim 1 , wherein the detecting means includes at least one selected from the group consisting of a force sensor, an electrical resistance meter, optical lever method measurement instrument, and a Raman spectrometer.  
     
     
         3 . The method according to  claim 1 , wherein each of the plurality of microstructures includes at least one minute vibrating cantilever.  
     
     
         4 . The method according to  claim 3 , further comprising providing vibration to the minute vibrating cantilever from without by using an electrostatic actuator or a piezoelectric actuator.  
     
     
         5 . The method according to  claim 4 , wherein there are a plurality of minute vibrating cantilevers, each having a different resonance frequency, the method further comprising adjusting a frequency of the provided vibration from without by the providing vibration step according to a desired resonance frequency of the minute vibrating cantilevers.  
     
     
         6 . The method according to  claim 4 , wherein there are an array of reaction regions, the method further comprising controlling at least one selected from the group consisting of heating of a reaction region, flow rate of reactant gas, and electric field for every reaction region.  
     
     
         7 . The method according to  claim 6 , wherein the heating of a reaction region done by a spot lamp, which locally heats by irradiating only a limited part, or a heater having a resistance heating element.  
     
     
         8 . The method according to  claim 6 , wherein each of reaction regions included in the array is provided in each of micro flow channels which are provided in a substrate by MEMS technology.  
     
     
         9 . The method according to  claim 8 , wherein each of the reaction regions is connected to a plurality of micro flow channels in a different direction, and wherein the method further comprising controlling a flow direction of the reactant gas which passes through the reaction region by adjusting a flow of the reactant gas for every micro flow channel, and to generate and grow the at least one carbon nanotube.  
     
     
         10 . The method according to  claim 1 , further comprising the steps of: 
 determining whether or not each of the generated and grown carbon nanotubes is a desired one based on the measured change in physical properties; and    burning up only one or more carbon nanotubes, which are determined that each of which is not desired one in the determining step, of the generated and grown carbon nanotubes either by applying electric current to the one or more non-desired carbon nanotubes via electrodes provided in the microstructures or by flowing an oxygen gas through the reaction region in which the one or more non-desired carbon nanotubes are formed therein.    
     
     
         11 . The method according to  claim 1 , wherein the generation and growth of the at least one carbon nanotube is done in a non-oxidizing atmosphere.  
     
     
         12 . A device for manufacturing carbon nanotube, comprising: 
 chamber support means for supporting a chamber which contains a plurality of microstructures, each of which is separated from each other by an interval;    gas providing means, connected to the chamber, for flowing at least one reactant gas, including raw material gas for manufacturing carbon nanotubes, through the chamber;    measurement means for measuring a change in physical properties of at least one of the plurality of microstructures by using detecting means; and    control means for controlling the gas providing means based on the measured change in physical properties.    
     
     
         13 . The device according to  claim 12 , further comprising: 
 at least one heating means for heating the plurality of microstructures in the chamber; and/or    electric field providing means for providing electric field to the plurality of microstructures in the chamber via at least one electrode connected to any of the plurality of microstructures,    and wherein the controlling means controls the heating means and/or the electric field providing means based on the measured change in physical properties.    
     
     
         14 . The device according to  claim 12 , wherein the detecting means includes at least one selected from the group consisting of a force sensor, an electrical resistance meter, optical lever method measurement instrument, and a Raman spectrometer.  
     
     
         15 . The device according to  claim 12 , wherein each of the plurality of microstructures includes at least one minute vibrating cantilever.  
     
     
         16 . The device according to  claim 12 , further comprising: 
 either an electrostatic actuator or a piezoelectric actuator for providing vibration to the minute vibrating cantilever from without.    
     
     
         17 . The device according to  claim 16 , wherein there are a plurality of minute vibrating cantilevers, each having a different resonance frequency, the device further comprising controlling means for controlling electrostatic actuator or a piezoelectric actuator to adjust a frequency of the provided vibration from without according to a desired resonance frequency of the minute vibrating cantilevers.