Vacuum pumping system

Abstract

A vacuum pumping system has at least two vacuum pumping devices with vacuum pumps, local electronic control units for monitoring and controlling the operating parameters of the pumps and a control station remotely located relative to the vacuum pumping devices. The control station is equipped with a remote control unit. The remote control unit and local control units are equipped with wireless communication modules for communicating data and commands and controlling the operation of the vacuum pumping devices. The wireless communication module of the remote control unit directly communicates with the wireless communication modules of the local control units.

1 . A vacuum pumping system ( 1 ) comprising: 
 a plurality of vacuum pumping devices ( 11 ;  31 ), each comprising a vacuum pump ( 13 ;  33 ) and a local electronic control unit ( 15 ;  35 ), which monitors and controls operating parameters of said pump; and    a control station ( 51 ) remotely located relative to said plurality of vacuum pumping devices ( 11 ;  31 ) and equipped with a remote control unit ( 53 ),    said remote control unit ( 53 ) and said local electronic control units ( 15 ;  35 ) being equipped with respective wireless communication modules ( 27 ,  55 ;  47 ,  55 ),    wherein said wireless communication module of said remote control unit is in a direct communication with said wireless communication modules of said local control units.    
   
   
       2 . The vacuum pumping system of  claim 1 , wherein said plurality of pumping devices comprises at least two pumping devices.  
   
   
       3 . The vacuum pumping system of  claim 2 , wherein said wireless communication module ( 55 ) of said remote control unit ( 53 ) is a multi-channel communication module, which communicates on each channel with the communication module ( 27 ; 47 ) of the local control unit ( 15 ; 35 ) of each said pumping device avoiding crosstalk between communication signals addressed to different pumping devices.  
   
   
       4 . The vacuum pumping system of  claim 1 , wherein said vacuum pumping devices ( 11 , 31 ) operate at pressures lower than 10 −4  mbar.  
   
   
       5 . The vacuum pumping system of  claim 1 , wherein at least one of said pumping devices ( 11 ) comprises a turbomolecular pump ( 13 ).  
   
   
       6 . The vacuum pumping system of  claim 1 , wherein at least one said pumping device ( 11 ) comprises a backing pump ( 33 )  
   
   
       7 . The vacuum pumping system of  claim 1 , comprises at least two vacuum pumping devices ( 11 ,  31 ), which are connected by a vacuum line and each comprises a vacuum pump ( 13 ,  33 ) and a local electronic control unit ( 15 ,  35 ) monitoring and controlling the operating parameters of a respective pump, each said local control unit ( 15 ,  35 ) is equipped with a wireless communication module ( 27 ,  47 ) conducting dialogue with said wireless communication module ( 55 ) of said remote control unit ( 53 ).  
   
   
       8 . The vacuum pumping system of  claim 7 , wherein said at least two pumping devices ( 11 ,  31 ) comprise a turbomolecular pump ( 13 ) and an oil mechanical pump ( 33 ), respectively.  
   
   
       9 . The vacuum pumping system of  claim 1 , comprises at least two independently operating vacuum pumping devices comprising each a vacuum pump and a local electronic control unit for monitoring and controlling the operating parameters of the respective pump, each said local control unit being equipped with a wireless communication module conducting a dialogue with said wireless communication module ( 55 ) of said remote control unit ( 53 ).  
   
   
       10 . The vacuum pumping system of  claim 9 , wherein said pumping devices further comprise a plurality of secondary apparatuses, which control and monitor operating parameters of said pumping devices.  
   
   
       11 . The vacuum pumping system of  claim 10 , wherein said secondary apparatuses comprises: 
 a pressure detector ( 19 ,  39 ) monitoring the residual pressure inside said pumping device;    a fan ( 21 ) cooling said pumping device;    a vent valve ( 23 ), a purge valve ( 25 );    an oil detector ( 41 ) monitoring a level and a temperature of an oil bath; and    a valve ( 43 ) controlling opening/closing of a vacuum line providing connection with another pumping device.    
   
   
       12 . The vacuum pumping system of  claim 1 , wherein said remote control unit ( 53 ) is associated with an electronic processor, by means of which the operating parameters of said vacuum pumps ( 13 ,  33 ) are monitored and controlled through said local electronic control units ( 15 ,  35 ).  
   
   
       13 . The vacuum pumping of  claim 10 , wherein the operating parameters of one or more of said secondary apparatuses can be monitored and controlled by means of an electronic processor, which is associated with said remote control unit ( 53 ).  
   
   
       14 . The vacuum pumping system of  claim 1 , wherein said wireless communication modules ( 27 ,  47 ,  55 ) are infrared communication modules.  
   
   
       15 . The vacuum pumping system of  claim 1 , wherein said wireless communication modules ( 27 ,  47 ,  55 ) are radiofrequency communication modules.  
   
   
       16 . The vacuum pumping system of  claim 1 , wherein said control station ( 51 ) is a portable device.