Magnetic film forming method, magnetic pattern forming method and magnetic recording medium manufacturing method

Abstract

At least one ion 6 selected from Cr, Al, Nb and Mo is locally implanted into a thin film 4 containing, as main components, at least one of Fe and Co and at least one of Pd and Pt and a boron ion 20 is then implanted into a whole surface of the thin film subjected to the implantation, and a heat treatment is thereafter carried out, and a portion 7 into which at least one ion 6 selected from Cr, Al, Nb and Mo and the boron ion 20 are implanted becomes a portion 9 having a small coercive force and a portion 8 into which only the boron ion 20 is implanted becomes a portion 10 having a large coercive force.

1 . A method of forming a magnetic film comprising steps of: 
 providing a thin film containing, as main components, at least one of Fe and Co and at least one of Pd and Pt;    locally implanting at least one ion selected from Cr, Al, Nb and Mo into the thin film;    implanting boron ion into a whole surface of the thin film; and    subjecting a heat treatment.    
     
     
         2 . The method of forming a magnetic film according to  claim 1 , wherein a portion having only the boron ion implanted therein which is obtained after the heat treatment has a CuAuI type ordered structure.  
     
     
         3 . The method of forming a magnetic film according to  claim 1 , wherein the thin film is obtained by laminating a film containing the at least one of Fe and Co as the main component and a film containing the at least one of Pd and Pt as the main component.  
     
     
         4 . The method of forming a magnetic film according to  claim 1 , wherein the thin film is a compositionally modulated film obtained by modulating compositions of the at least one of Fe and Co and the at least one of Pd and Pt in a direction of a thickness of the film.  
     
     
         5 . A method of forming a magnetic pattern comprising the steps of: 
 implanting at least one ion selected from Cr, Al, Nb and Mo by using a mask into a predetermined portion of a thin film containing, as main components, at least one of Fe and Co and at least one of Pd and Pt;    implanting boron ion into a whole surface of the thin film; and    subjecting a heat treatment.    
     
     
         6 . A method of manufacturing a magnetic recording medium having a non-magnetic substrate and a magnetic film provided on the non-magnetic substrate, comprising the steps of: 
 providing a thin film containing, as main components, at least one of Fe and Co and at least one of Pd and Pt;    locally implanting at least one ion selected from Cr, Al, Nb and Mo into the thin film containing;    implanting boron ion into a whole surface of the thin film; and    subjecting a heat treatment.    
     
     
         7 . The method of manufacturing a magnetic recording medium according to  claim 6 , wherein the local implantation of the at least one ion selected from Cr, Al, Nb and Mo is carried out by using a mask.