Bending actuators and sensors constructed from shaped active materials and method for making the same

Abstract

Bender devices are demonstrated by developing non-uniform fields within a homogeneous, non-planar single slab active member material of non-uniform thickness through geometrical constraints and electrode placement. Single slab actuators are demonstrated for semiconductor designs including MEMS applications. Single slab bender periodic designs are demonstrated to be well suited for MEMS fabrication. Shaped actuators having a topological pattern formed across at least one portion are demonstrated to induced strain at the patterned portion of the actuator, causing the patterned portion to flare into open and close positions upon application of an external field. Voltage transformers, spark generators, power sources, and sensors are developed using the non-planar, homogeneous, single slab active member material of non-uniform thickness. Last, semiconductor process design techniques are demonstrated for periodic and other non-planar single slab actuators.

1 - 29 . (canceled)  
   
   
       30 . A periodic actuator having plates, beams, a top and bottom surface, comprising a non-planar shaped, single layer active member of homogeneous material having a topological pattern repeated across at least one surface of said active member, said periodic actuator having non-uniform fields induced therein when subjected to an external field, said non-uniform fields defined by said non-planar shape and causing strain to vary inside said member in a manner that causes said member to bend.  
   
   
       31 . The periodic actuator of  claim 30  wherein said active member slab further comprises said topological pattern repeated across said top surface such that said top surface includes peaks and troughs, said top and bottom surfaces not being equidistant across said slab.  
   
   
       32 . The periodic actuator of  claim 30  further comprising having said topological pattern work to cause bending in perpendicular directions to said plates and beams of said actuator.  
   
   
       33 . The periodic actuator of  claim 30  further comprising a single layer of homogeneous piezoelectric, electrostrictive, or magnetostrictive material.  
   
   
       34 . The periodic actuator of  claim 30  comprising a geometric design period for said topological pattern.  
   
   
       35 . The periodic actuator of  claim 30  further comprising electrodes placed on said top and bottom surfaces or portions thereof.  
   
   
       36 . The periodic actuator of  claim 30  comprising sloping sides on said top surface such that said sloping sides are not parallel or perpendicular to said bottom surface.  
   
   
       37 . The periodic actuator of  claim 36  including said topological pattern having a predetermined sloping angle.  
   
   
       38 . The periodic actuator of  claim 37  comprising said predetermined sloping angle of approximately sixty degrees (60°) with respect to said bottom surface.  
   
   
       39 . The periodic actuator of  claim 35  comprising a plurality of slots having said electrodes on said peaks of said top surface in a limited top electrode design with no electrodes in said troughs.  
   
   
       40 . The periodic actuator of  claim 39  comprising having a bottom electrode continuous across said bottom surface.  
   
   
       41 . The periodic actuator of  claim 30  comprising having said topological pattern formed across a region of said shaped actuator at a first end, such that induced strain will cause said first end of said actuator to flare into open and close positions upon application of said external field.  
   
   
       42 . The periodic actuator of  claim 41  wherein said non-planar shape includes a center axial portion cut therethrough.  
   
   
       43 . The periodic actuator of  claim 42  further comprising a cylindrically shaped actuator having a top end with said topological pattern causing said cylindrically shaped actuator top end to flare into open and close positions upon application of said external field.  
   
   
       44 . The periodic actuator of  claim 31  wherein said active member slab further comprises said topological pattern repeated across said bottom surface such that said bottom surface includes peaks and troughs.  
   
   
       45 - 59 . (canceled)