Exposure apparatus and air-conditioning apparatus for use with exposure apparatus

Abstract

An air-conditioning apparatus includes an air-conditioning apparatus body; a gas supply duct disposed in the body; and an impurity-removing filter disposed inside the gas supply duct. An exposure apparatus includes a chamber; an exposure unit disposed within the chamber and forming patterns on a substrate, wherein an inside of the chamber is air-conditioned by the air-conditioner.

1 . An air-conditioning apparatus, comprising: 
 an air-conditioning apparatus body;    a gas supply duct disposed in said body; and    an impurity-removing filter disposed inside said gas supply duct.    
   
   
       2 . An air-conditioning apparatus according to  claim 1 , wherein: 
 said impurity-removing filter comprises a hollow cylindrical body.    
   
   
       3 . An air-conditioning apparatus according to  claim 1 , wherein: 
 said impurity-removing filter comprises a bellows wall.    
   
   
       4 . An air-conditioning apparatus according to  claim 1 , wherein: 
 a support member disposed between an inner wall of said gas supply duct and said impurity-removing filter, said support member supporting said impurity-removing filter within said inner wall of said gas supply duct such that said impurity-removing filter is kept out of contact with said inner wall of said gas supply duct.    
   
   
       5 . An air-conditioning apparatus according to  claim 1 , wherein: 
 said support member is formed to be a ring-shape and connected to both an edge of a bottom of said impurity-removing filter and said inner wall of the duct.    
   
   
       6 . An air-conditioning apparatus according to  claim 1 , wherein: 
 a top plate portion of said impurity-removing filter is made of stainless steel or fluororesin.    
   
   
       7 . An air-conditioning apparatus according to  claim 1 , further comprising: 
 a baffle plate disposed upstream of said impurity-removing filter in order to diffuse gas stream passing through said impurity-removing filter.    
   
   
       8 . An air-conditioning apparatus according to  claim 4 , wherein: 
 said impurity-removing filter comprises a hollow cylindrical body, and    said support member supports a plurality of positions along the length of said impurity-removing filter.    
   
   
       9 . An air-conditioning apparatus according to  claim 1 , wherein: 
 said impurity-removing filter comprises a box-like shape or a polygon shape.    
   
   
       10 . An exposure apparatus comprising: 
 a chamber;    an exposure unit disposed within said chamber and forming patterns on a substrate,    werein an inside of said chamber is air-conditioned by said air-conditioner according to  claim 1 .    
   
   
       11 . An exposure apparatus comprising: 
 a chamber;    an exposure unit disposed in said chamber and forming patterns on a substrate; and    an air-conditioning apparatus connected to said chamber and air-conditioning an inside of said chamber;    wherein said air-conditioning apparatus comprises an air-conditioning apparatus body, a gas supply duct disposed in said body and an impurity-removing filter disposed inside said gas supply duct.    
   
   
       12 . An air-conditioning apparatus according to  claim 11 , wherein: 
 said duct which comprises said impurity-removing filter is detachable.    
   
   
       13 . An air-conditioning apparatus according to  claim 12 , wherein: 
 said impurity-removing filter is a chemical filter or a particle filter.