Fixing member for evaporation apparatus

Abstract

An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.

1 . A fixing member for an evaporation apparatus, the evaporation apparatus including an elongated crucible having an upper opening and storing an evaporation material and an electric heater which covers the upper opening of the elongated crucible, generates heat by causing electric current to flow therein for heating the evaporation material stored in the crucible, and has an opening through which can pass the evaporation material which is vaporized by heating, 
 the fixing member comprising:    a curved portion formed by curving a plate-like spring member into a convex shape;    side surface portions each bending upward from one of the ends of the curved portion; and    claw portions bending toward the inner side to form substantially a right angle at the upper end portions of the side surface portions,    wherein, due to spring urging force generated by pressing a vertex of the curved portion onto a bottom of the crucible, inner portions of the respective claw portions contacting the upper edges of the electric heater press the electric heater onto the crucible for fixing the electric heater onto the crucible.    
   
   
       2 . A fixing member for an evaporation apparatus according to  claim 1 , wherein 
 at least one of the curved portion and the side surface portions includes an opening.    
   
   
       3 . A fixing member for an evaporation apparatus according to  claim 1 , wherein 
 each of the claw portions is formed by bending an upper end of a discrete claw plate which contacts and is fixed onto the side surface portion.    
   
   
       4 . A fixing member for an evaporation apparatus according to  claim 3 , wherein 
 the curved portion and the side surface portions are formed by a refractory and anti-corrosion alloy.    
   
   
       5 . A fixing member for an evaporation apparatus according to  claim 3 , wherein 
 at least one of the curved portion and the side surface portions has an opening.    
   
   
       6 . A fixing member for an evaporation apparatus according to  claim 3 , wherein 
 the thickness of the curved portion and the side surface portions differs from the thickness of the claw plates including the claw portions.    
   
   
       7 . A fixing member for an evaporation apparatus according to  claim 6 , wherein 
 at least one of the curved portion and the side surface portions has an opening.    
   
   
       8 . A fixing member for an evaporation apparatus according to  claim 6 , wherein 
 the curved portion and the side surface portions are formed from a refractory and anti-corrosion alloy.    
   
   
       9 . A fixing member for an evaporation apparatus according to  claim 8 , wherein 
 at least one of the curved portion and the side surface portions has an opening.    
   
   
       10 - 14 . (canceled)