Power supply unit for generating plasma and plasma apparatus including the same

Abstract

A power supply unit includes: a power source generating a radio frequency power; an impedance matching box connected to the power source and matching an internal impedance of the power source and a load impedance; a first feed line connected to the impedance matching box; a radio frequency distributing means connected to the first feed line; and a plasma electrode connected to the radio frequency distributing means, the radio frequency distributing means supplying the radio frequency power to a plurality of points of the plasma electrode.

1 . A power supply unit, comprising: 
 a power source generating a radio frequency power;    an impedance matching box connected to the power source and matching an internal impedance of the power source and a load impedance;    a first feed line connected to the impedance matching box;    a radio frequency distributing means connected to the first feed line; and    a plasma electrode connected to the radio frequency distributing means, the radio frequency distributing means supplying the radio frequency power to a plurality of points of the plasma electrode.    
   
   
       2 . The power supply unit according to  claim 1 , wherein the radio frequency power is symmetrically supplied to the plurality of points of the plasma electrode.  
   
   
       3 . The power supply unit according to  claim 1 , wherein the radio frequency distributing means comprises: 
 a distributing part having a plate shape, the first feed line being connected to a central portion of the distributing part; and    a plurality of second feed lines connecting the distributing part and the plasma electrode.    
   
   
       4 . The power supply unit according to  claim 3 , wherein the plurality of second feed lines have a cylindrical shape.  
   
   
       5 . The power supply unit according to  claim 3 , wherein the plurality of second feed lines have a plate shape.  
   
   
       6 . The power supply unit according to  claim 5 , wherein the plurality of second feed lines include first and second plates facing each other and connecting two edge sides of the distributing part and the plasma electrode.  
   
   
       7 . The power supply unit according to  claim 5 , wherein the plurality of second feed lines include first, second, third and fourth plates connecting four edge sides of the distributing part and the plasma electrode, the first and second plates facing each other and the third and fourth plates facing each other.  
   
   
       8 . The power supply unit according to  claim 1 , wherein the radio frequency distributing means comprises: 
 a distributing part having a plurality of radial branches, the first feed line being connected to a central portion of the distributing part; and    a plurality of second feed lines connecting the distributing part and the plasma electrode.    
   
   
       9 . The power supply unit according to  claim 8 , wherein the distributing part is parallel to the plasma electrode.  
   
   
       10 . The power supply unit according to  claim 8 , wherein the distributing part constitutes a plurality of electric paths for transmitting the radio frequency power to the plasma electrode, and the plurality of electric paths have a substantially equal length to each other.  
   
   
       11 . The power supply unit according to  claim 1 , wherein the radio frequency distributing means comprises: 
 a first distributing part having a plurality of radial branches, the first feed line being connected to a central portion of the first distributing part;    a second distributing part extending from the first distributing part; and    a plurality of second feed lines connecting the first distributing part and the plasma electrode and connecting the second distributing part and the plasma electrode.    
   
   
       12 . The power supply unit according to  claim 11 , wherein the first and second distributing parts are parallel to the plasma electrode.  
   
   
       13 . The power supply unit according to  claim 11 , wherein the second distributing part has a plurality of branches, each branch extending from each radial branch.  
   
   
       14 . The power supply unit according to  claim 11 , wherein the first and second distributing parts constitute a plurality of electric paths for transmitting the radio frequency power to the plasma electrode, and the plurality of electric paths have a substantially equal length to each other.  
   
   
       15 . A plasma apparatus, comprising: 
 a process chamber treating a substrate;    a power source outside the process chamber and generating a radio frequency power;    an impedance matching box connected to the power source and matching an internal impedance of the power source and a load impedance;    a first feed line connected to the impedance matching box;    a distributing part over the process chamber, the first feed line being connected to a central portion of the distributing part;    a plasma electrode in the process chamber;    a plurality of second feed lines connecting the distributing part and the plasma electrode, the distributing part and the plasma electrode supplying the radio frequency power to a plurality of points of the plasma electrode; and    a susceptor facing the plasma electrode and having the substrate thereon.    
   
   
       16 . The plasma apparatus according to  claim 15 , wherein the plurality of second feed lines connect the distributing part and the plasma electrode through the process chamber.  
   
   
       17 . The plasma apparatus according to  claim 15 , further comprising a housing surrounding the distributing part.  
   
   
       18 . The plasma apparatus according to  claim 15 , wherein the distributing part has a plate shape and the first feed line is connected to a central portion of the distributing part.  
   
   
       19 . The plasma apparatus according to  claim 15 , wherein the distributing part has a plurality of radial branches and the first feed line is connected to a central portion of the distributing part.  
   
   
       20 . The plasma apparatus according to  claim 15 , wherein the distributing part comprises: 
 a first sub-distributing part having a plurality of radial branches, the first feed line being connected to a central portion of the first distributing part; and    a second sub-distributing part extending from the first distributing part,    wherein the plurality of second feed lines connect the first sub-distributing part and the plasma electrode and connect the second sub-distributing part and the plasma electrode.