Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber

Abstract

A vacuum treatment chamber generates disk-shaped workpieces with directly bondable surface. The chamber is a stand-alone chamber in ambient atmosphere and has a plasma discharge section. A gas supply is operatively connected with a gas tank arrangement predominantly containing nitrogen. A workpiece holding arrangement is formed by a magazine with a multitude of slits, each for a workpiece to be simultaneously treated in said vacuum treatment chamber.

1 - 23 . (canceled)  
   
   
       24 . A vacuum cleaning chamber of  claim 25 , wherein said access slits are open to the interior of said vacuum cleaning chamber.  
   
   
       25 . The chamber of  claim 24 , wherein said holding arrangement defines for a holding plane for said disk-shaped or plate workpieces and said slits extend substantially parallel to said plane.  
   
   
       26 . The chamber of  claim 25 , wherein said slits extend laterally with respect to said holding plane.  
   
   
       27 - 28 . (canceled)  
   
   
       29 . The chamber of  claim 35 , wherein said plasma discharge section is a low-voltage discharge section.  
   
   
       30 . The chamber of  claim 29 , wherein said low-voltage discharge section comprises an electron-emitting hot cathode.  
   
   
       31 . (canceled)  
   
   
       32 . The chamber of  claim 35 , wherein said tank arrangement feeds to said gas supply said gas comprising a working gas.  
   
   
       33 . The chamber of  claim 32 , wherein said working gas includes at least one noble gas.  
   
   
       34 . (canceled)  
   
   
       35 . A vacuum treatment chamber for generating disk-shaped workpieces with directly bondable surfaces, said chamber being a stand-alone chamber in ambient, comprising a plasma discharge section, a gas supply operatively connected with a gas tank arrangement predominantly containing nitrogen, a workpiece holding arrangement comprising a magazine with slits, each slit being arranged for a workpiece to be simultaneously treated in said vacuum treatment chamber.