Method of evaporating film used in an organic electro-luminescent display

Abstract

In evaporating thin film used in organic electro-luminescent (EL) display, a mask having a plurality of openings is placed below a display substrate, and a plane evaporation source is placed below the mask. The plane evaporation source has a plurality of evaporating material cells which are respectively aligned to the openings of the mask. Next, evaporating the evaporating material cells, a plurality of thin films is deposited on predetermined regions of the display substrate.

1 . A method of evaporating thin film used in organic electro-luminescent display, comprising steps of: 
 providing a display substrate;    providing a mask having a plurality of openings and placed below the display substrate;    providing a plane evaporation source placed below the mask, wherein the plane evaporation source has a plurality of thin films arranged in array which are respectively aligned to the openings of the mask; and    evaporating the thin films from the plane evaporation source to deposit a plurality of thin films on predetermined regions of the display substrate.    
     
     
         2 . The method according to  claim 1 , wherein the thin films are of organic electro-luminescent materials.  
     
     
         3 . The method according to  claim 1 , wherein the formation of the plane evaporation source comprises steps of: 
 providing a metal plate;    providing at least one kind of evaporation source placed below the metal plate; and    evaporating the evaporation source to form the thin films on the metal plate.    
     
     
         4 . The method according to  claim 3 , wherein the formation of the plane evaporation source further comprises a step of providing a mask which has a plurality of openings and is disposed between the metal plate and the evaporation source.  
     
     
         5 . The method according to  claim 3 , wherein a plurality of types of evaporation sources are provided below the metal plate.  
     
     
         6 . The method according to  claim 3 , wherein the metal plate is rotated during evaporation.  
     
     
         7 . The method according to  claim 3 , wherein the back side of the metal plate comprises a plurality of supporting ribs.  
     
     
         8 - 15 . (canceled)  
     
     
         16 . A method of evaporating thin film used in organic electro-luminescent display, comprising steps of: 
 providing a display substrate;    providing a mask having a plurality of openings and placed below the display substrate;    providing a plane evaporation source placed below the mask, wherein the plane evaporation source has a plurality of evaporating material cells arranged in two-dimensional array which are respectively aligned to the openings of the mask; and    evaporating the evaporating material cells from the plane evaporation source to deposit a plurality of thin films on predetermined regions of the display substrate.    
     
     
         17 . The method according to  claim 16 , wherein the evaporating material cells are of organic electro-luminescent materials.  
     
     
         18 . The method according to  claim 16 , wherein the formation of the plane evaporation source comprises steps of: 
 providing a metal plate;    providing at least one kind of evaporation source placed below the metal plate; and    evaporating the evaporation source to form the evaporating material cells on the metal plate.    
     
     
         19 . The method according to  claim 18 , wherein the formation of the plane evaporation source further comprises a step of providing a mask which has a plurality of openings and is disposed between the metal plate and the evaporation source.  
     
     
         20 . The method according to  claim 18 , wherein a plurality of types of evaporation sources are provided below the metal plate.  
     
     
         21 . The method according to  claim 18 , wherein the metal plate is rotated during evaporation.  
     
     
         22 . The method according to  claim 18 , wherein the back side of the metal plate comprises a plurality of supporting ribs.