Force provider for a mover assembly of a stage assembly

Abstract

A force provider ( 232 A) for a stage assembly ( 220 A) includes a provider housing ( 238 A) and a piston assembly ( 240 A). The provider housing ( 238 A) defines a piston chamber ( 344 ), and includes a first beam aperture ( 352 F), a first cylinder aperture ( 350 F) that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture ( 350 S) that is in fluid communication with a fluid at the first pressure. The piston assembly ( 340 ) includes a piston ( 356 ) positioned in the piston chamber ( 344 ), and a first beam ( 358 F) extending through the first beam aperture ( 352 F). The first beam ( 358 F) is secured to the piston ( 356 ). The piston ( 356 ) moves along a piston path ( 462 ). At a second piston region ( 462 S) of the piston path ( 462 ) the piston ( 356 ) is positioned between the cylinder apertures ( 350 F)( 350 S).

1 . A force provider comprising: 
 a provider housing that defines a piston chamber, the provider housing including a first beam aperture, a first cylinder aperture that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture that is in fluid communication with a fluid that is approximately at the first pressure; and    a piston assembly including a piston positioned in the piston chamber, and a first beam extending through the first beam aperture, the piston including a first piston side and a second piston side, the first beam being secured to the first piston side, the piston moving relative to the provider housing along a piston path, wherein at a first piston region of the piston path, the piston is positioned between the first beam aperture and the first cylinder aperture and at a second piston region of the piston path, the piston is positioned between the cylinder apertures.    
   
   
       2 . The force provider of  claim 1  wherein the provider housing includes a second beam aperture, the piston assembly includes a second beam extending through the second beam aperture, the second beam being secured to the second piston side.  
   
   
       3 . The force provider of  claim 1  wherein at the first piston region, the pressure of the fluid on the first piston side is greater than the pressure of the fluid on the second piston side.  
   
   
       4 . The force provider of  claim 3  wherein at the second piston region, the pressure of the fluid on the first piston side is approximately equal to the pressure of the fluid on the second piston side.  
   
   
       5 . The force provider of  claim 4  wherein at a third piston region of the piston path, the pressure of the fluid on the second piston side is greater than the pressure of the fluid on the first piston side.  
   
   
       6 . The force provider of  claim 5 , wherein in the third piston region, the piston is positioned between the second cylinder aperture and a second beam aperture in the provider housing.  
   
   
       7 . The force provider of  claim 1  wherein at the second piston region, the pressure of the fluid on the first piston side is approximately equal to the pressure of the fluid on the second piston side.  
   
   
       8 . The force provider of  claim 1  wherein at a third piston region of the piston path, the pressure of the fluid on the second piston side is greater than the pressure of the fluid on the first piston side.  
   
   
       9 . The force provider of  claim 8 , wherein in the third piston region, the piston is positioned between the second cylinder aperture and a second beam aperture in the provider housing.  
   
   
       10 . The force provider of  claim 1  wherein a wall gap exists between the piston and the provider housing so that the piston moves easily relative to the provider housing.  
   
   
       11 . A force provider assembly comprising the force provider of  claim 1  and a fluid source that directs a fluid into the piston chamber near the first piston region.  
   
   
       12 . The force provider assembly of  claim 11  wherein the amount of fluid directed into the piston chamber by the fluid source is approximately equal to the amount of fluid that escapes between the piston and the provider housing and between the first beam and the provider housing.  
   
   
       13 . The force provider assembly of  claim 12  wherein the fluid source directs fluid into the piston chamber so that the pressure on the first piston side does not decrease when the piston is moving in a first direction in the first piston region.  
   
   
       14 . The force provider of  claim 1  further comprising an intermediate piston positioned within the piston chamber, the intermediate piston moving concurrently with the piston when the piston is positioned in the first piston region and wherein the piston moves relative to the intermediate piston when the piston is positioned in the second piston region.  
   
   
       15 . The force provider of  claim 14  wherein the piston is not fixedly coupled to the intermediate piston.  
   
   
       16 . The force provider of  claim 14  wherein the first bar extends through the intermediate piston.  
   
   
       17 . A stage assembly for moving a device along a stage path that includes a first stage region and a second stage region, the stage assembly comprising: 
 a stage that retains the device;    a mover that moves the stage along the stage path; and    the force provider of  claim 1  coupled to the stage.    
   
   
       18 . The stage assembly of  claim 17  wherein the force provider provides an acceleration/deceleration force on the stage when the stage is in the first stage region and approximately no force on the stage when the stage is in the second stage region.  
   
   
       19 . The stage assembly of  claim 18  wherein the stage path includes a third stage region and the force provider provides an acceleration/deceleration force on the stage when the stage is in the third stage region.  
   
   
       20 . An exposure apparatus including the stage assembly of  claim 17 .  
   
   
       21 . An object on which an image has been formed by the exposure apparatus of  claim 20 .  
   
   
       22 . A semiconductor wafer on which an image has been formed by the exposure apparatus of  claim 20 .  
   
   
       23 . A force provider assembly for use with a mover for moving a stage along a stage path that includes a first stage region and a second stage region, the force provider assembly comprising: 
 a pneumatic force provider coupled to the stage, the force provider providing an acceleration/deceleration force on the stage when the stage is in the first stage region and approximately no force on the stage when the stage is in the second stage region.    
   
   
       24 . The force provider assembly of  claim 23  wherein the stage path includes a third stage region and the force provider provides an acceleration/deceleration force on the stage when the stage is in the third stage region.  
   
   
       25 . A force provider assembly of  claim 23  wherein the force provider comprises (i) a provider housing that defines a piston chamber, the provider housing including a first beam aperture, a first cylinder aperture that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture that is in fluid communication with a fluid at approximately the first pressure; and (ii) a piston assembly including a piston positioned in the piston chamber, and a first beam extending through the first beam aperture, the piston including a first piston side and a second piston side, the first beam being secured to the first piston side, the piston moving relative to the provider housing along a piston path, wherein at a first piston region of the piston path, the piston is positioned between the first beam aperture and the first cylinder aperture and at a second piston region of the piston path, the piston is positioned between the cylinder apertures.  
   
   
       26 . A force provider assembly of  claim 23  wherein the force provider comprises (i) a provider housing that defines a piston chamber, the provider housing including a first beam aperture, a second beam aperture, a first cylinder aperture that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture that is in fluid communication with a fluid at approximately the first pressure; and (ii) a piston assembly including a piston positioned in the piston chamber, a first beam extending through the first beam aperture and a second beam extending through the second beam aperture, the piston including a first piston side and a second piston side, the first beam being secured to the first piston side and the second beam being secured to second piston side, the piston moving relative to the provider housing along a piston path, wherein at a first piston region of the piston path, the piston is positioned between the first beam aperture and the first cylinder aperture and at a second piston region of the piston path, the piston is positioned between the cylinder apertures.  
   
   
       27 . The force provider assembly of  claim 26  wherein at the first piston region, the pressure of the fluid on the first piston side is greater than the pressure of the fluid on the second piston side.  
   
   
       28 . The force provider assembly of  claim 27  wherein at the second piston region, the pressure of the fluid on the first piston side is approximately equal to the pressure of the fluid on the second piston side.  
   
   
       29 . The force provider assembly of  claim 27  wherein at a third piston region of the piston path, the pressure of the fluid on the second piston side is greater than the pressure of the fluid on the first piston side.  
   
   
       30 . The force provider assembly of  claim 29 , wherein in the third piston region, the piston is positioned between the second cylinder aperture and the second beam aperture.  
   
   
       31 . The force provider assembly of  claim 26  wherein a wall gap exists between the piston and the provider housing so that the piston moves easily relative to the provider housing.  
   
   
       32 . The force provider assembly of  claim 26  further comprising a fluid source that directs a fluid into the piston chamber near the first piston region.  
   
   
       33 . The force provider assembly of  claim 32  wherein the amount of fluid directed into the piston chamber by the fluid source is approximately equal to the amount of fluid that escapes between the piston and the provider housing and between the first beam and the provider housing.  
   
   
       34 . The force provider assembly of  claim 32  wherein the fluid source directs fluid into the piston chamber so that the pressure on the first piston side does not decrease when the piston is moving in a first direction in the first piston region.  
   
   
       35 . The force provider assembly of  claim 23  wherein the force provider further comprises a provider housing that defines a piston chamber, a piston positioned within the piston chamber and an intermediate piston positioned within the piston chamber, the intermediate piston moving concurrently with the piston when the stage is positioned in the first stage region and wherein the piston moves relative to the intermediate piston when the stage is positioned in the second stage region.  
   
   
       36 . The force provider assembly of  claim 35  wherein the piston is not fixedly coupled to the intermediate piston.  
   
   
       37 . A stage assembly for moving a device, the stage assembly comprising: 
 a stage that retains the device;    a mover that moves the stage along the stage path; and    the force provider assembly of  claim 23  coupled to the stage.    
   
   
       38 . An exposure apparatus including the stage assembly of  claim 37 .  
   
   
       39 . An object on which an image has been formed by the exposure apparatus of  claim 38 .  
   
   
       40 . A semiconductor wafer on which an image has been formed by the exposure apparatus of  claim 38 .  
   
   
       41 . A force provider comprising: 
 a provider housing that defines a piston chamber; and    a piston assembly including a piston and a first intermediate piston positioned within the piston chamber, the piston moving relative to the provider housing along a piston path that includes a first piston region and a second piston region, wherein the first intermediate piston moves concurrently with the piston when the piston is positioned in at least a portion of the first piston region and wherein the piston moves relative to the first intermediate piston when the piston is positioned in the second piston region.    
   
   
       42 . The force provider of  claim 41  wherein the piston is not fixedly coupled to the first intermediate piston.  
   
   
       43 . The force provider of  claim 41  further comprising a first bar that is secured to the piston, the first bar extending through the first intermediate piston and through the provider housing.  
   
   
       44 . The force provider of  claim 43  further comprising a first intermediate bar that is secured to the first intermediate piston, the first intermediate bar extending through the provider housing.  
   
   
       45 . The force provider of  claim 44  wherein the first bar extends through the first intermediate bar.  
   
   
       46 . The force provider of  claim 41  wherein (i) the piston assembly includes a second intermediate piston that is positioned within the piston chamber, (ii) the piston path includes a second piston region, (iii) the second intermediate piston moves concurrently with the piston when the piston is positioned in at least a portion of the third piston region, and (iv) the piston moves relative to the second intermediate piston when the piston is positioned in the first piston region and the second piston region.  
   
   
       47 . The force provider of  claim 41  wherein the provider housing includes a first beam aperture, a first cylinder aperture that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture that is in fluid communication with a fluid that is approximately at the first pressure, and wherein the piston assembly includes a first beam extending through the first beam aperture, the piston including a first piston side and a second piston side, the first beam being secured to the first piston side, wherein at the first piston region of the piston path, the piston is positioned between the first beam aperture and the first cylinder aperture and at the second piston region of the piston path, the piston is positioned between the cylinder apertures.  
   
   
       48 . The force provider of  claim 47  wherein at the first piston region, the pressure of the fluid on the first piston side is greater than the pressure of the fluid on the second piston side.  
   
   
       49 . The force provider of  claim 48  wherein at the second piston region, the pressure of the fluid on the first piston side is approximately equal to the pressure of the fluid on the second piston side.  
   
   
       50 . The force provider of  claim 49  wherein at a third piston region of the piston path, the pressure of the fluid on the second piston side is greater than the pressure of the fluid on the first piston side.  
   
   
       51 . The force provider of  claim 50 , wherein in the third piston region, the piston is positioned between the second cylinder aperture and a second beam aperture in the provider housing.  
   
   
       52 . The force provider of  claim 41  wherein a wall gap exists between the piston and the provider housing so that the piston moves easily relative to the provider housing.  
   
   
       53 . A stage assembly for moving a device along a stage path that includes a first stage region and a second stage region, the stage assembly comprising: 
 a stage that retains the device;    a mover that moves the stage along the stage path; and    the force provider of  claim 41  coupled to the stage.    
   
   
       54 . The stage assembly of  claim 53  wherein the force provider provides an acceleration/deceleration force on the stage when the stage is in the first stage region and approximately no force on the stage when the stage is in the second stage region.  
   
   
       55 . The stage assembly of  claim 54  wherein the stage path includes a third stage region and the force provider provides an acceleration/deceleration force on the stage when the stage is in the third stage region.  
   
   
       56 . An exposure apparatus including the stage assembly of  claim 53 .  
   
   
       57 . An object on which an image has been formed by the exposure apparatus of  claim 56 .  
   
   
       58 . A semiconductor wafer on which an image has been formed by the exposure apparatus of  claim 56 .  
   
   
       59 . A method for accelerating and decelerating a stage that is moved along a stage path that includes a first stage region and a second stage region, the method comprising the step of: 
 coupling a pneumatic force provider to the stage, the force provider providing an acceleration/deceleration force on the stage when the stage is in the first stage region and approximately no force on the stage when the stage is in the second stage region.    
   
   
       60 . The method of  claim 59  wherein the stage path includes a third stage region and the force provider provides an acceleration/deceleration force on the stage when the stage is in the third stage region.  
   
   
       61 . A method of  claim 59  wherein the step of coupling includes the step of providing a force provider that comprises (i) a provider housing that defines a piston chamber, the provider housing including a first beam aperture, a first cylinder aperture that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture that is in fluid communication with a fluid at approximately the first pressure; and (ii) a piston assembly including a piston positioned in the piston chamber, and a first beam extending through the first beam aperture, the piston including a first piston side and a second piston side, the first beam being secured to the first piston side, the piston moving relative to the provider housing along a piston path, wherein at a first piston region of the piston path, the piston is positioned between the first beam aperture and the first cylinder aperture and at a second piston region of the piston path, the piston is positioned between the cylinder apertures.  
   
   
       62 . A method of  claim 59  wherein the step of coupling includes the step of providing a force provider that comprises (i) a provider housing that defines a piston chamber, the provider housing including a first beam aperture, a second beam aperture, a first cylinder aperture that is in fluid communication with a fluid at a first pressure and a spaced apart second cylinder aperture that is in fluid communication with a fluid at approximately the first pressure; and (ii) a piston assembly including a piston positioned in the piston chamber, a first beam extending through the first beam aperture and a second beam extending through the second beam aperture, the piston including a first piston side and a second piston side, the first beam being secured to the first piston side and the second beam being secured to second piston side, the piston moving relative to the provider housing along a piston path, wherein at a first piston region of the piston path, the piston is positioned between the first beam aperture and the first cylinder aperture and at a second piston region of the piston path, the piston is positioned between the cylinder apertures.  
   
   
       63 . The method of  claim 61  wherein at the first piston region, the pressure of the fluid on the first piston side is greater than the pressure of the fluid on the second piston side.  
   
   
       64 . The method of  claim 63  wherein at the second piston region, the pressure of the fluid on the first piston side is equal to the pressure of the fluid on the second piston side.  
   
   
       65 . The method of  claim 64  wherein at a third piston region of the piston path, the pressure of the fluid on the second piston side is greater than the pressure of the fluid on the first piston side.  
   
   
       66 . The method of  claim 65 , wherein in the third piston region, the piston is positioned between the second cylinder aperture and the second beam aperture.  
   
   
       67 . The method of  claim 62  further comprising the step of directing a fluid from a fluid source into the piston chamber near the first piston region.  
   
   
       68 . The method of  claim 59  further comprising the step of coupling a mover to the stage that moves the stage along the stage path.  
   
   
       69 . The method of  claim 59  wherein the step of coupling includes the step of providing a force provider that comprises (i) a provider housing that defines a piston chamber; and (ii) a piston assembly including a piston and a first intermediate piston positioned within the piston chamber, the piston moving relative to the provider housing along a piston path that includes a first piston region and a second piston region, wherein the first intermediate piston moves concurrently with the piston when the piston is positioned in at least a portion of the first piston region, and wherein the piston moves relative to the first intermediate piston when the piston is positioned in the second piston region.  
   
   
       70 . The method of  claim 69  wherein the piston is not fixedly coupled to the first intermediate piston.  
   
   
       71 . A method for making an exposure apparatus comprising the steps of providing an illumination source, providing a stage, and accelerating and decelerating the stage by the method of  claim 59 .  
   
   
       72 . A method of making a wafer including the steps of providing a substrate and forming an image on the substrate with the exposure apparatus made by the method of  claim 71.