US2005169589A1PendingUtilityA1
Compositions and methods involving direct write optical lithography
Est. expiryJan 30, 2022(expired)· nominal 20-yr term from priority
G03F 7/70308G03F 7/70291G03F 7/70275
47
PatentIndex Score
0
Cited by
0
References
0
Claims
Abstract
In one embodiment, fiber optic arrays or bundles are used as a light guide to transmit ultraviolet light to the substrate surface for photo-directed polymer synthesis Digital Micromirror Array (DMA) is used as a switching device to reflect light onto the entry side of the fiber optic array
Claims
exact text as granted — not AI-modified1 - 17 . (canceled)
18 . An optical lithography system comprising
a light source; a substrate mount; a switching device comprising a digital micromirror array; and a light guide comprising a fiber optical array wherein the light guide reflects light onto substrate.
19 . The optical lithographic system of claim 18 wherein the fiber optical array comprises a staggered array of fiber optic elements.
20 . The optical lithographic system of claim 19 further comprising a scanning mechanism to translate the optical array across the substrate.Join the waitlist — get patent alerts
Track US2005169589A1 — get alerts on status changes and closely related new filings.
We store only your email — no account needed. See our privacy policy.