US2005169589A1PendingUtilityA1

Compositions and methods involving direct write optical lithography

Assignee: AFFYMETRIX INCPriority: Jan 30, 2002Filed: Mar 25, 2005Published: Aug 4, 2005
Est. expiryJan 30, 2022(expired)· nominal 20-yr term from priority
G03F 7/70308G03F 7/70291G03F 7/70275
47
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Claims

Abstract

In one embodiment, fiber optic arrays or bundles are used as a light guide to transmit ultraviolet light to the substrate surface for photo-directed polymer synthesis Digital Micromirror Array (DMA) is used as a switching device to reflect light onto the entry side of the fiber optic array

Claims

exact text as granted — not AI-modified
1 - 17 . (canceled)  
   
   
       18 . An optical lithography system comprising 
 a light source;    a substrate mount;    a switching device comprising a digital micromirror array; and    a light guide comprising a fiber optical array wherein the light guide reflects light onto substrate.    
   
   
       19 . The optical lithographic system of  claim 18  wherein the fiber optical array comprises a staggered array of fiber optic elements.  
   
   
       20 . The optical lithographic system of  claim 19  further comprising a scanning mechanism to translate the optical array across the substrate.

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