Kinematic pin with shear member and substrate carrier for use therewith

Abstract

A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear feature of the substrate carrier to deter lateral movement of the substrate carrier relative to the kinematic pin. A substrate carrier handler that employs the kinematic pin is also provided.

1 . A kinematic pin for supporting a substrate carrier, comprising: 
 a pin body comprising: 
 an inclined surface adapted to slidably communicate with an inclined surface of a mating feature of a substrate carrier, and adapted to allow the mating feature to locate on and laterally align with the kinematic pin via the force of gravity; and  
 a shear member adapted to deter a lateral inertial load arising from the substrate carrier from urging the mating feature of the substrate carrier into misalignment with the kinematic pin.  
   
   
   
       2 . The kinematic pin of  claim 1 , wherein the shear member protrudes from the pin body.  
   
   
       3 . The kinematic pin of  claim 1  wherein the shear member abuts the inclined surface.  
   
   
       4 . The kinematic pin of  claim 3 , wherein the inclined surface of the pin body comprises an upward-tapering frustoconical surface and the shear member comprises a cylindrical surface protruding upward from the frustoconical surface.  
   
   
       5 . The kinematic pin of  claim 4 , wherein the frustoconical surface and the cylindrical surface are symmetrically aligned about a common vertical axis.  
   
   
       6 . The kinematic pin of  claim 4 , wherein the shear member comprises an end distal the frustoconical surface of the pin body and a flat surface at the distal end of the shear member.  
   
   
       7 . The kinematic pin of  claim 6 , wherein the shear member comprises a broken edge between the flat surface and the cylindrical surface.  
   
   
       8 . The kinematic pin of  claim 7 , wherein the broken edge comprises a rounded edge.  
   
   
       9 . The kinematic pin of  claim 7 , wherein the broken edge comprises a second upward-tapering frustoconical surface.  
   
   
       10 . The kinematic pin of  claim 4 , wherein the shear member comprises a hemispherical end distal the frustoconical surface and abutting the cylindrical surface.  
   
   
       11 . A method of deterring lateral movement of a substrate carrier comprising: 
 providing a kinematic pin for supporting a substrate carrier, the kinematic pin having an inclined surface and a shear member extending upwardly from the inclined surface;    placing a substrate carrier having a feature adapted to mate with the kinematic pin, in contact with the kinematic pin such that the kinematic pin contacts the mating feature;    aligning the substrate carrier on the kinematic pin via the inclined surface; and    deterring lateral movement of the aligned substrate carrier via the shear member.    
   
   
       12 . The method of  claim 11  wherein deterring lateral motion comprises placing the shear member of the kinematic pin within a portion of the substrate carrier's mating feature that has generally vertical walls, wherein the portion of the substrate carrier's mating feature and the shear member are adapted to deter lateral movement of the substrate carrier.  
   
   
       13 . The method of  claim 12  further comprising accelerating the substrate carrier so as to generate an inertial force between the substrate carrier and the kinematic pin.  
   
   
       14 . A substrate carrier comprising: 
 a substrate carrier body adapted to support a substrate and having a bottom surface;    one or more features located on the bottom surface of the substrate carrier body and adapted to interface with a kinematic pin so as to align the substrate carrier on the kinematic pin; and    a shear member interface located within the one or more features on the bottom surface of the substrate carrier, having generally vertical sides and adapted to interface with a shear member of a kinematic pin so as to deter lateral motion of the substrate carrier relative to the kinematic pin.    
   
   
       15 . The substrate carrier of  claim 14  wherein the shear member interface is adapted to receive a shear member of the kinematic pin.  
   
   
       16 . The substrate carrier of  claim 14  wherein the bottom surface of the substrate carrier body has three of the features adapted to interface with a kinematic pin.  
   
   
       17 . A substrate carrier handler comprising: 
 a surface for supporting a substrate carrier;    one or more kinematic pins located on the surface for supporting a substrate carrier, having: 
 an inclined surface for aligning the substrate carrier; and  
 a shear member extending from the inclined surface, for deterring lateral movement of the substrate carrier relative to the one or more kinematic pins; and  
 a controller adapted to cause the substrate carrier handler to accelerate the surface for supporting a substrate carrier so as to generate a lateral inertial load between the one or more kinematic pins, and a substrate carrier supported thereon.  
   
   
   
       18 . The substrate carrier handler of  claim 17  wherein the shear member extends upwardly from the inclined surface.