Device and method for surface working

Abstract

The invention relates to a method for surface working of a body having a first surface to be worked and a second surface to be worked. The method includes, in a first step, providing a first tool and a second tool, in a second step, placing the body between the first tool and the second tool, and, in a third step, working the first surface and the second surface. The first surface is worked by a first working surface of the first tool, the first working surface having a first central area. The second surface is worked by a second working surface of the second tool, the second working surface having a second central area. In the third step, the second tool lies opposite to the first tool to form a working gap, the working gap mainly extending in a working gap plane. Furthermore, in the third step, the body, in at least one guide movement, is guided substantially parallel to the working gap plane between the first tool and the second tool, and at least a part of at least one of the first surface and the second surface is guided over the central area of the associated one of the first working surface and the second working surface. The invention further relates to a corresponding device for surface working.

1 . A method for surface working of a body having a first surface to be worked and a second surface to be worked, comprising 
 in a first step, providing a first tool and a second tool,    in a second step, placing said body between said first tool and said second tool, and,    in a third step, working said first surface and said second surface;    said first surface being worked by a first working surface of said first tool, said first working surface having a first central area,    said second surface being worked by a second working surface of said second tool, said second working surface having a second central area,    said second tool, in said third step, lying opposite to said first tool to form a working gap, said working gap mainly extending in a working gap plane,    said body, in at least one guide movement in said third step, being guided substantially parallel to said working gap plane between said first tool and said second tool, and    at least a part of at least one of said first surface and said second surface being guided over said central area of the associated one of said first working surface and said second working surface.    
     
     
         2 . The method according to  claim 1 , wherein at least a part of at least one of said first surface and said second surface is guided over the center of area of the associated one of said first working surface and said second working surface.  
     
     
         3 . The method according to  claim 1 , wherein 
 at least one of said first working surface and said second working surface executes an at least partly rotary movement,    said first working surface executing an at least partly rotary first working surface movement,    said second working surface executing an at least partly rotary second working surface movement and    at least a part of at least one of said first surface and said second surface is guided over the instantaneous center of motion of the associated one of said first working surface and said second working surface.    
     
     
         4 . The method according to  claim 1 , wherein, in at least one guide movement in said third step, said body is guided substantially parallel to said working gap plane between said first tool and said second tool.  
     
     
         5 . The method according to  claim 4 , wherein said body is guided in a first guide movement along a first guide direction and is guided in a second guide movement along a second direction running transverse to said first direction.  
     
     
         6 . The method according to  claim 5 , wherein said first guide movement of said body along said first direction is selectable independently of said second guide movement of said body along said second direction.  
     
     
         7 . The method according to  claim 5 , wherein at least one of the speed and the excursion of at least of one of said first guide movement and said second guide movement is continuously adjustable.  
     
     
         8 . The method according to  claim 4 , wherein, in said third step, a linear or sinusoidal guide movement is imposed on said body.  
     
     
         9 . The method according to  claim 4 , wherein, in said third step, at least one of said first tool and said second tool is displaced in at least one of a first tool displacement movement and a second tool displacement movement.  
     
     
         10 . The method according to  claim 9 , wherein, 
 in said third step, at least one of said first tool and said second tool is displaced in a first tool displacement movement and a second tool displacement movement,    said first tool displacement movement being directed along a first displacement direction and said second tool displacement movement being directed along a second displacement direction running transverse to said first displacement direction.    
     
     
         11 . The method according to  claim 9 , wherein said first displacement direction and said second displacement direction run parallel to said working gap plane.  
     
     
         12 . The method according to  claim 9 , wherein said first tool displacement movement is selectable independently of said second tool displacement movement.  
     
     
         13 . The method according to  claim 9 , wherein at least one of the speed and the excursion of at least of one of said first tool displacement movement and said second tool displacement movement is continuously adjustable.  
     
     
         14 . The method according to  claim 9 , wherein a linear or sinusoidal tool displacement movement is imposed on at least one of said first tool and said second tool.  
     
     
         15 . The method according to  claim 1 , wherein at least one of a first tool movement is imposed on said first tool and a second tool movement is imposed on said second tool.  
     
     
         16 . The method according to  claim 15 , wherein 
 at least one of said first tool movement and said second tool movement is a rotary movement,    said first tool movement being a first rotary movement about a first tool axis which is substantially perpendicular to said working gap plane,    said second tool movement being a second rotary movement about a second tool axis which is substantially perpendicular to said working gap plane.    
     
     
         17 . The method according to  claim 16 , wherein said first tool axis is adjustable transverse to said second tool axis.  
     
     
         18 . The method according to  claim 16 , wherein said first tool axis is arranged offset transverse to said second tool axis.  
     
     
         19 . The method according to  claim 15 , wherein said first tool movement is independent of said second tool movement.  
     
     
         20 . The method according to  claim 15 , wherein at least one of the speed and the excursion of at least one of said first tool movement and said second tool movement is continuously adjustable.  
     
     
         21 . The method according to  claim 1 , wherein 
 at least one of a first tool movement is imposed on said first tool and a second tool movement is imposed on said second tool.    said at least one guide movement and at least one of said first tool movement and said second tool movement are controlled such that, as a result of their superposition, a relative movement with substantially uniform surface-covering material removal on said body is obtained between said body and at least one of said first tool and said second tool.    
     
     
         22 . The method according to  claim 21 , wherein said at least one guide movement and at least one of said first tool movement and said second tool movement are controlled such that, as a result of their superposition, an epicycloidal relative movement is obtained between said body and at least one of said first tool and said second tool.  
     
     
         23 . The method according to  claim 1 , wherein the contact pressure between at least one of said first tool and said second tool and said body is adjustable.  
     
     
         24 . The method according to  claim 29 , wherein it is used for grinding, lapping, honing or polishing said body.  
     
     
         25 . The method according to  claim 1 , wherein said body is an LCD mask.  
     
     
         26 . A device for surface working of a body having a first surface to be worked and a second surface to be worked, comprising 
 a first tool,    a second tool, and    a guide device;    said first tool having a first working surface for working said first surface, said first working surface having a first central area,    said second tool having a second working surface for working said second surface, said second working surface having a second central area,    said second tool being located opposite to said first tool when working said body to form a working gap, said working gap mainly extending in a working gap plane,    said guide device, in at least one guide movement, guiding said body substantially parallel to said working gap plane, said body being arranged between said first tool and said second tool within said working gap,    said guide device guiding at least a part of at least one of said first surface and said second surface over said central area of the associated one of said first working surface and said second working surface.    
     
     
         27 . The device according to  claim 26 , wherein said guide device is arranged for guiding at least a part of at least one of said first surface and said second surface over the center of area of the associated one of said first working surface and said second working surface.  
     
     
         28 . The device according to  claim 26 , wherein 
 at least one of a first tool drive device and a second tool drive device is provided,    said first tool drive device effecting an at least partly rotary first working surface movement of said first working surface,    said second tool drive device effecting an at least partly rotary second working surface movement of said second working surface and    said guide device being arranged for guiding at least a part of at least one of said first surface and said second surface over the instantaneous center of motion of the associated one of said first working surface and said second working surface.    
     
     
         29 . The device according to  claim 26 , wherein said guide device is imposing a first guide movement on said body along a first direction and imposing a second guide movement on said body along a second direction running transverse to said first direction.  
     
     
         30 . The device according to  claim 29 , wherein said first guide movement is independent of said second guide movement.  
     
     
         31 . The device according to  claim 29 , wherein said guide device comprises a first guide drive device effecting said first guide movement.  
     
     
         32 . The device according to  claim 31 , wherein said guide device comprises a second guide drive device effecting said second guide movement.  
     
     
         33 . The device according to  claim 29 , wherein said guide device comprises at least one device constructed in the fashion of a cross slide.  
     
     
         34 . The device according to  claim 29 , wherein at least one of the speed and the excursion of at least one of said first guide movement and said second guide movement is continuously adjustable.  
     
     
         35 . The device according to  claim 29 , wherein said guide device is imposing a linear guide movement on said body.  
     
     
         36 . The device according to  claim 29 , wherein said guide device is imposing a sinusoidal guide movement on said body.  
     
     
         37 . The device according to  claim 26 , wherein 
 at least one of a first tool drive device and a second tool drive device is provided,    said first tool drive device effecting a first tool movement of said first tool,    said second tool drive device effecting a second tool movement of said second tool.    
     
     
         38 . The device according to  claim 37 , wherein 
 at least one control device is provided, said control device being connected to said guide device and to at least one of said first tool drive device and said second tool drive device,    said control device controlling said at least one guide movement and controlling at least one of said first tool movement and said second tool movement such that, as a result of their superposition, a relative movement with substantially uniform surface-covering material removal on the body results between said body and at least one of said first tool and said second tool.    
     
     
         39 . The device according to  claim 38 , wherein said control device controls said at least one guide movement and controls at least one of said first tool movement and said second tool movement such that, as a result of their superposition, an epicycloidal relative movement results between said body and at least one of said first tool and said second tool.  
     
     
         40 . The device according to  claim 37 , wherein 
 at least one of said first tool movement and said second tool movement is a rotary movement,    said first tool movement being a first rotary movement about a first tool axis which is substantially perpendicular to said working gap plane,    said second tool movement being a second rotary movement about a second tool axis which is substantially perpendicular to said working gap plane.    
     
     
         41 . The device according to  claim 40 , wherein said first tool axis is adjustable transverse to said second tool axis.  
     
     
         42 . The device according to  claim 40 , wherein said first tool axis is arranged offset to said second tool axis.  
     
     
         43 . The device according to  claim 37 , wherein said first tool movement is independent of said second tool movement.  
     
     
         44 . The device according to  claim 37 , wherein at least one of the speed and the excursion of at least one of said first tool movement and said second tool movement is continuously adjustable.  
     
     
         45 . The device according to  claim 37 , wherein 
 at least one of said first tool drive device and said second tool drive device effects a first tool displacement movement and a second tool displacement movement,    said first tool displacement movement being directed along a first displacement direction and said second tool displacement movement being directed along a second displacement direction running transverse to said first displacement direction.    
     
     
         46 . The device according to  claim 45 , wherein said first displacement direction and said second displacement direction run parallel to said working gap plane.  
     
     
         47 . The device according to  claim 45 , wherein said first tool displacement movement is selectable independently of said second tool displacement movement.  
     
     
         48 . The device according to  claim 45 , wherein at least one of the speed and the excursion of at least of one of said first tool displacement movement and said second tool displacement movement is continuously adjustable.  
     
     
         49 . The device according to  claim 45 , wherein a linear or sinusoidal tool displacement movement is imposed on at least one of said first tool and said second tool.  
     
     
         50 . The device according to  claim 47 , wherein at least one of said first tool drive device and said second tool drive device is arranged to adjust the contact pressure between the associated one of said first tool and said second tool and said body.  
     
     
         51 . The device according to  claim 26 , wherein at least one of said first tool and said second tool comprises a grinding disk or a lapping disk or a honing disk or a polishing disk.  
     
     
         52 . The device according to  claim 36 , wherein said body is an LCD mask.