Semiconductor device and process for producing the same

Abstract

Process for producing a semiconductor device includes forming an insulation layer on a semiconductor substrate surface and depositing a silicon layer on the insulation layer, a reaction barrier layer such as a metal nitride layer on the first metallic layer and a second metallic layer on the barrier layer, processing a stacked structure of the silicon layer, first metallic layer, barrier layer and second metallic layer to form a gate electrode, using the gate electrode as a mask and doping an impurity into the surface of the semiconductor substrate to form active regions of the device, heat reacting the first metallic layer with the silicon layer to form a metal silicide layer between the reaction barrier layer and the silicon layer. The heat reaction process effected may be performed prior to or after the formation of the gate electrode. The metal silicide film may be a deposited film.

1 . A process for producing a semiconductor device, comprising the steps of: 
 (a) forming a first insulation layer on a surface of a semiconductor substrate;    (b) forming a silicon layer on the first insulation layer;    (c) forming a first metallic layer on the silicon layer;    (d) forming a metal nitride layer on the first metallic layer;    (e) forming a second metallic layer on the metal nitride layer;    (f) etching a stacked structure of the silicon layer, the first metallic layer, the metal nitride layer and the second metallic layer and forming a gate electrode; and    (g) annealing the gate electrode and reacting the first metallic layer with the silicon layer, thereby forming a metal silicide layer between the metal nitride layer and the silicon layer.    
   
   
       2 . A process according to  claim 1 , wherein the step (g) is carried out at 650° C. or higher.  
   
   
       3 . A process according to  claim 1 , wherein the metal silicide layer is a tungsten silicide layer, the metal nitride layer is a tungsten nitride layer, and the first and second metallic layers are tungsten layers.  
   
   
       4 . A process according to  claim 1 , wherein the silicon layer is doped with an impurity.  
   
   
       5 . A process according to  claim 1 , wherein the silicon layer is a polycrystalline silicon layer.  
   
   
       6 . A process according to  claim 1 , wherein, in the step (g), the reaction of the first metallic layer with the silicon layer during annealing is such that the metal silicide layer is formed to have a thickness of about twice as large as the first metallic layer.  
   
   
       7 . A process for producing a semiconductor device, comprising the steps of: 
 (a) forming a first insulation layer on a surface of a semiconductor substrate;    (b) forming a silicon layer on the first insulation layer;    (c) forming a first metallic layer on the silicon layer;    (d) forming a metal nitride layer on the first metallic layer;    (e) forming a second metallic layer on the metal nitride layer;    (f) annealing a stacked layer comprising the silicon layer, the first metallic layer, the metal nitride layer and the second metallic layer and reacting the first metallic layer with the silicon layer, thereby forming a metal silicide layer between the metal nitride layer and the silicon layer; and    (g) etching the stacked layer and forming a gate electrode.    
   
   
       8 . A process according to  claim 7 , wherein the step (f) is carried out at 650° C. or higher.  
   
   
       9 . A process according to  claim 7 , wherein the metal silicide layer is a tungsten silicide layer, the metal nitride layer is a tungsten nitride layer and the first and second metallic layers are tungsten layers.  
   
   
       10 . A process according to  claim 7 , wherein the silicon layer is doped with an impurity.  
   
   
       11 . A process according to  claim 7 , wherein the silicon layer is a polycrystalline silicon layer.  
   
   
       12 . A process according to  claim 7 , wherein, in the step (f), the reaction of the first metallic layer with the silicon layer is such that the metal silicide layer is formed to have a thickness of about twice as large as the first metallic layer.  
   
   
       13 . A process for producing a semiconductor device, comprising the steps of: 
 (a) forming a first insulation layer on a surface of a semiconductor substrate;    (b) forming a silicon layer on the first insulation layer;    (c) forming a metal silicide layer on the silicon layer;    (d) forming a metal nitride layer on the metal silicide layer;    (e) forming a metallic layer on the metal nitride layer; and    (f) etching the stacked layer comprising the silicon layer, the metal silicide layer, the metal nitride layer and the metallic layer, and forming a gate electrode.    
   
   
       14 . A process according to  claim 13 , wherein the metal silicide layer is a tungsten silicide layer, the metal nitride layer is a tungsten nitride layer and the metallic layer is a tungsten layer.  
   
   
       15 . A process according to  claim 13 , wherein the silicon layer is doped with an impurity.  
   
   
       16 . A process according to  claim 13 , wherein the silicon layer is a polycrystalline silicon layer.