Anodic bonding

Abstract

A controller is used with an anodic bonding system that has a charge flowpath for supplying charge to bond materials together. The controller includes a switch and a circuit. The switch is configured to control a flow of the charge through the charge flowpath. The circuit is configured to monitor a rate of the flow, use the rate to determine an amount of the charge supplied for bonding, and based on the amount or rate, operate the switch to control the flow.

1 . A controller for use with an anodic bonding system having a charge flowpath for supplying charge for bonding materials together, comprising: 
 a switch configured to control a flow of the charge through the charge flowpath; and    a circuit configured to: 
 monitor a rate of the flow,  
 use the rate to determine an amount of the charge supplied for bonding, and  
 based on the amount, operate the switch to control the flow.  
   
   
   
       2 - 33 . (canceled)  
   
   
       34 . A controller for use with an anodic bonding system having a charge flowpath for supplying charge for bonding materials together, comprising: 
 a switch to control a flow of the charge through the charge flowpath; and    a circuit coupled to the switch to: 
 control the switch to connect a voltage source to the charge flowpath, and  
 control the switch to disconnect the voltage source from the charge flowpath in response to measurement of a predetermined amount of the charge being transferred to the materials.  
   
   
   
       35 . The controller of  claim 34 , wherein the circuit is further configured to measure the charge through the charge flowpath.  
   
   
       36 . The controller of  claim 34 , wherein the circuit is further configured to control the switch to reconnect the voltage source to the charge flow path in response to a predetermined duration expiring after the switch disconnects the voltage source from the charge flowpath.  
   
   
       37 . The controller of  claim 36 , wherein the circuit includes: 
 a timer configured to measure the predetermined duration.    
   
   
       38 . The controller of  claim 34 , wherein the circuit includes: 
 an integrator to determine the amount of charge supplied to the materials based on the integration of a rate of the charge over time.    
   
   
       39 . The controller of  claim 38 , wherein the circuit further includes: 
 a comparator connected to the integrator and to indicate when the amount of charge exceeds a predetermined threshold.