SPM cantilever and fabricating method thereof

Abstract

Disclosed herein is SPM cantilever having a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, said probe portion having a generally plate-like form and the probe portion having an additionally sharpened terminal end portion. The terminal end portion has its length greater than the plate thickness thereof and is reduced in thickness toward a tip of the terminal end portion, and the tip is located inwardly of the planes extended from the front and back sides of a base portion of the plate-like probe portion.

1 . An SPM cantilever comprising a support portion, a lever portion extended from the support portion and a probe portion formed at a free end of the lever portion, wherein said probe portion is generally pyramidal or conic and the pyramidal or conic probe portion has an additionally sharpened terminal end portion.  
   
   
       2 . The SPM cantilever according to  claim 1 , wherein said probe portion is generally in the form of a triangular pyramid.  
   
   
       3 . The SPM cantilever according to  claim 1 , wherein said probe portion is generally in the form of a circular cone.  
   
   
       4 . The SPM cantilever according to  claim 1 , wherein said probe portion is formed of silicon nitride.  
   
   
       5 . The SPM cantilever according to  claim 2 , wherein said probe portion is formed of silicon nitride.  
   
   
       6 . The SPM cantilever according to  claim 3 , wherein said probe portion is formed of silicon nitride.